Control of grain size and size effect on the dielectric constant of diamond films

Ye HT.; Hing P.; Sun CQ.

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Control of grain size and size effect on the dielectric constant of diamond films

机译：控制晶粒尺寸和尺寸对金刚石薄膜介电常数的影响

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This work reports that the optimum diamond grain size can be controlled by adjusting the flow rate of Ar/H-2 in the reaction chamber through orthogonal optimization. The dielectric properties of the diamond films were investigated using an RCL (resistance-capacitance-inductance) meter. It was found that (i) the dominating factors in controlling the grain size are in the following order: Ar/H-2 gas ratio, gas total pressure, plasma power and substrate temperature; (ii) increasing the Ar gas fraction reduces the grain size of synthetic diamond films; and (iii) reducing the grain size lowers the dielectric constant. The grain size effect on the dielectric behaviour can be explained by the change of the crystal field caused by surface bond contraction of the nanosized particles. [References: 16]

机译：这项工作报告说，可以通过正交优化调整反应室中Ar / H-2的流速来控制最佳金刚石晶粒尺寸。使用RCL（电阻-电容-电感）表对金刚石薄膜的介电性能进行了研究。发现（i）控制晶粒尺寸的主要因素按以下顺序：Ar / H-2气体比，气体总压力，等离子体功率和衬底温度; （ii）增加Ar气含量会降低合成金刚石薄膜的晶粒尺寸; （iii）减小晶粒尺寸会降低介电常数。晶粒尺寸对介电性能的影响可以通过由纳米尺寸颗粒的表面键收缩引起的晶场变化来解释。 [参考：16]

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《Journal of Physics, D. Applied Physics: A Europhysics Journal》 |2000年第23期|共9页
作者
Ye HT.; Hing P.; Sun CQ.;
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正文语种 eng
中图分类应用物理学;
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Microwave plasmas; Deposition;

机译：微波等离子体;沉积;

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1. 压痕尺寸和晶粒/亚晶粒尺寸对高纯钨显微硬度的影响 [J] . 刘光玉, 倪颂, 宋旼中国有色金属学报（英文版） . 2015,第010期
2. 压痕尺寸和晶粒/亚晶粒尺寸对高纯钨显微硬度的影响 [J] . 刘光玉, 倪颂, 宋旼中国有色金属学报：英文版 . 2015,第010期
3. Control of grain size and size effect on the dielectric constant of diamond films [J] . Ye HT., Hing P., Sun CQ. Journal of Physics, D. Applied Physics: A Europhysics Journal . 2000,第23期

机译：控制晶粒尺寸和尺寸对金刚石薄膜介电常数的影响
4. Ultralow-Dielectric-Constant Films Prepared from Hollow Polyimide Nanoparticles Possessing Controllable Core Sizes [J] . Gufan Zhao, Takayuki Ishizaka, Hitoshi Kasai Chemistry of Materials: A Publication of the American Chemistry Society . 2009,第2期

机译：由空心聚酰亚胺纳米粒子制备的超低介电常数薄膜，具有可控的核尺寸
5. Chemically derived Zn0.90-xMn0.05Fe0.05AlxO thin films: Tuning of crystallite/grain size, optical and dielectric constants and ferromagnetic properties through Al substitutions [J] . Babur Y., Tumbul A., Yildirim M. Materials science in semiconductor processing . 2018,第期

机译：化学衍生的Zn0.90-XMN0.05FE0.05ALXO薄膜：通过Al替换调整微晶/晶粒尺寸，光学和介电常数和铁磁性性质
6. Ellipsometric study of CVD diamond films prepared with various grain sizes [C] . Yanyan Lou, Linjun Wang, Hongliang Ma, International Conference on Thin Film Physics and Applications . 2008

机译：用各种晶粒尺寸制备的CVD金刚石膜的椭圆型研究
7. Study of PECVD films containing flourine and carbon and diamond like carbon films for ultra low dielectric constant interlayer dielectric applications. [D] . Sundaram, Nandini Ganapathy. 2016

机译：用于超低介电常数层间电介质应用的含氟和碳的PECVD膜和类金刚石碳膜的研究。
8. Stable fabrication of a large nanopore by controlled dielectric breakdown in a high-pH solution for the detection of various-sized molecules [O] . Itaru Yanagi, Rena Akahori, Ken-ichi Takeda -1

机译：通过在高pH溶液中进行可控的介电击穿来稳定制造大型纳米孔以检测各种大小的分子
9. Wear of Polycrystalline Diamond Tool in Cutting of SiC Grain Reinforced Plastic. Influence of Grain Sizes of SiC and Diamond. [O] . Katsumi YAMAGUCHI, Jamal El-Deen AFAGHANI, Takeshi NAKAMOTO, 1996

机译：SiC晶粒增强塑料切割的多晶金刚石工具的磨损。 SiC和钻石粒度的影响。
10. Grain boundaries and grain size distributions in nanocrystalline diamond films derived from fullerene precursors [R] . Csencsits, R. , Zuiker, C. D. , Gruen, D. M. , 1995

机译：富勒烯前体衍生的纳米金刚石薄膜的晶界和晶粒尺寸分布

Control of grain size and size effect on the dielectric constant of diamond films

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