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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Using Langmuir probes to measure the plasma decay rates in pulsed RF magnetron discharges
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Using Langmuir probes to measure the plasma decay rates in pulsed RF magnetron discharges

机译：使用Langmuir探头测量脉冲射频磁控管放电中的等离子体衰减率

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Time-resolved measurements of the electron temperature T., plasma density n, floating V-f and plasma potentials V-p. have been made at different positions along the centre line in a pulsed RF magnetron plasma (frequency 50 Hz, 50% duty cycle). In the afterglow, T-e and n were found to decay with two characteristic times. These are in the ranges tau (1t) similar to 25-50 mus, tau (2t) similar to 120-130 mus, and tau (1n) similar to 35-330 mus, tau (2n) similar to 100-485 mus for T-e and n, respectively. The density decay times increase with pressure over the chosen range (0.27-2.13 Pa), while the temperature decay times are generally insensitive to pressure. The rate of particle loss is found to increase at positions closer to the cathode. A simple one-dimensional diffusion model indicates that during the 'off' times, the rate of density decay is governed by the ion flux across the floating sheath formed at the cathode. This sheath itself decays due to the falling electron temperature. [References: 23]
机译：电子温度T.，等离子体密度n，浮动V-f和等离子体电势V-p的时间分辨测量。在脉冲RF磁控管等离子体中（沿频率为50 Hz，占空比为50％）在中心线的不同位置进行了测量。在余辉中，发现T-e和n衰减了两个特征时间。它们的范围在tau（1t）类似于25-50 mus，tau（2t）类似于120-130 mus，tau（1n）类似于35-330 mus，tau（2n）类似于100-485 mus Te和n分别。在选定的范围内（0.27-2.13 Pa），密度衰减时间随压力增加而增加，而温度衰减时间通常对压力不敏感。发现在靠近阴极的位置处颗粒损失的速率增加。一个简单的一维扩散模型表明，在“关闭”期间，密度衰减的速率由跨过在阴极处形成的浮鞘的离子通量控制。该护套本身由于电子温度的下降而衰减。 [参考：23]

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