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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures
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Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures

机译：Ar和Ar-CF4混合物中电感耦合等离子体中E-H跃迁的光学计算机断层扫描

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We have applied optical emission spectroscopy together with computerized tomography (CT) to study the transition between E and H modes in inductively coupled plasma. Measurements were performed in pure Ar and in CF4(5%)/Ar mixture in the pressure range between 5 and 300 mTorr. It was found that the radial and azimuthal CT images of the E (capacitively coupled) mode are quite different from those of the H (inductively coupled) mode. The E mode structures show clearly the presence of capacitive coupling, while the structure of the H mode corresponds to that of the predicted induced fields. The differences diminish at low pressures due to the non-local transport of electrons. The contributions of direct and stepwise excitation are separated by using two different energy levels, 2p(1) and 2p(9), of Ar. In addition, the measurements obtained in electronegative gas mixture with large losses of electrons of moderate and small energy show more clearly the kinetics of excitation in the two modes and the regions where high-energy electrons are produced. [References: 19]
机译：我们已经将光发射光谱法与计算机断层扫描（CT）一起应用来研究电感耦合等离子体中E模式和H模式之间的过渡。在纯Ar和CF4（5％）/ Ar混合物中在5至300 mTorr的压力范围内进行测量。发现E（电容耦合）模式的径向和方位CT图像与H（电感耦合）模式的径向和方位CT图像完全不同。 E模式的结构清楚地显示了电容耦合的存在，而H模式的结构对应于预测的感应场。由于电子的非局部传输，这种差异在低压下会减小。通过使用Ar的两个不同的能级2p（1）和2p（9）分离了直接激励和逐步激励的作用。另外，在具有中等能量和较小能量的大电子损失的负电气体混合物中获得的测量结果更清楚地显示了在两种模式和产生高能电子的区域中激发的动力学。 [参考：19]

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