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首页> 外文期刊>Journal of Physical and Chemical Reference Data >Elastic Cross Sections for Electron Collisions with Molecules Relevant toPlasma Processing
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Elastic Cross Sections for Electron Collisions with Molecules Relevant toPlasma Processing

机译：与分子碰撞相关的分子碰撞的弹性截面

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摘要

Absolute electron-impact cross sections for molecular targets, including their radicals, are important in developing plasma reactors and testing various plasma processing gases. Low-energy electron collision data for these gases are sparse and only the limited cross section data are available. In this report, elastic cross sections for electron-polyatomic molecule collisions are compiled and reviewed for 17 molecules relevant to plasma pro-cessing. Elastic cross sections are essential for the absolute scale conversion of inelastic cross sections, as well as for testing computational methods. Data are collected and reviewed for elastic differential, integral, and momentum transfer cross sections and, for each molecule, the recommended values of the cross section are presented. The literature has been surveyed through early 2010.
机译：分子靶标（包括其自由基）的绝对电子轰击截面对于开发等离子体反应器和测试各种等离子体处理气体非常重要。这些气体的低能电子碰撞数据很少，只有有限的横截面数据可用。在本报告中，针对电子-多原子分子碰撞的弹性截面进行了编辑和审查，以查找与等离子体处理相关的17个分子。弹性横截面对于非弹性横截面的绝对比例转换以及测试计算方法必不可少。收集并查看有关弹性微分，积分和动量传递横截面的数据，并针对每个分子显示横截面的建议值。文献已被调查到2010年初。

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