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首页> 外文期刊>Journal of Sound and Vibration >Numerical analysis of fluid-structure interaction effects on vibrations of cantilever microstructure
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Numerical analysis of fluid-structure interaction effects on vibrations of cantilever microstructure

机译：流固耦合对悬臂微结构振动影响的数值分析

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The operation of microelectromechanical systems (MEMS) with movable parts is often strongly affected by a fluid-structure interaction. Microelectromechanical devices often operate in ambient pressure, therefore air functions as an important working fluid. The influence of air in MEMS devices manifests as viscous air damping, which can be divided into two categories: slide-film damping and squeeze-film damping. The former occurs in laterally moving devices (e.g. comb drives), while the latter is characteristic for MEMS devices, in which a microstructure moves or bends towards a rigid surface with a thin air film in-between (as in microswitch). This paper reports results of numerical analysis of squeeze-film damping effects on free and forced vibrations of cantilever microstructure. Three separate finite element models are used for simulations. Each model is based on different form of Reynolds equation: nonlinear, linearized and linearized incompressible. Squeeze-film damping is associated with displacements of microstructure by using weak formulations of the equations that are coupled to lower surface of the microstructure, which is represented in three-dimensional (3D) and is treated as flexible in the analysis. Both small- and large-amplitude motions are considered. Comparison of results obtained with different models is presented and suggestions are given regarding the usage of particular form of Reynolds equation for modelling air-damping effects in the case of developed electrostatic microswitch. (C) 2007 Elsevier Ltd. All rights reserved.
机译：具有可移动部件的微机电系统（MEMS）的操作通常受流体-结构相互作用的强烈影响。微机电设备通常在环境压力下运行，因此空气起着重要的工作流体的作用。空气在MEMS器件中的影响表现为粘性空气阻尼，它可以分为两类：滑动膜阻尼和挤压膜阻尼。前者出现在横向移动设备（例如梳状驱动器）中，而后者则是MEMS设备的特征，其中微结构朝着刚性表面移动或弯曲，中间有薄薄的空气膜（如微动开关）。本文报道了挤压膜阻尼对悬臂微结构自由振动和强迫振动的数值分析结果。三个单独的有限元模型用于仿真。每个模型都基于不同形式的雷诺方程：非线性，线性化和线性化不可压缩。挤压膜阻尼通过使用与微观结构下表面耦合的方程的弱公式与微观结构的位移相关联，该方程以三维（3D）表示，在分析中被视为灵活的。小幅度和大幅度运动都被考虑。提出了使用不同模型获得的结果的比较，并提出了关于在开发的静电微动开关的情况下使用特定形式的雷诺方程来建模空气阻尼效应的建议。 （C）2007 Elsevier Ltd.保留所有权利。

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