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首页> 外文期刊>Journal of the Korean Physical Society >Analysis of the Dielectric Characteristics of In-Plane-Polarized FerroelectricTransducers Using Interdigitated Electrodes
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Analysis of the Dielectric Characteristics of In-Plane-Polarized FerroelectricTransducers Using Interdigitated Electrodes

机译：利用叉指电极分析平面极化铁电换能器的介电特性

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摘要

The dielectric characteristics of in-plane-polarized ferroelectric transducers are analyzed and anequivalent model is suggested. The geometric configuration of ferroelectric transducers with inter-digitated electrodes (IDE) is symmetrically simplified and the electric field distribution is analyzedusing the finite-element method (FEM). The FEM result shows that the field distribution of theinner ferroelectric film between the electrodes is uniform in the in-plane direction and that theeffects of the fields in the air and in the inner ferroelectric film under the electrodes are negligible.A simplified in-plane equivalent model is derived from the results and the effectiveness of the modelis verified by comparing a capacitance value calculated using the model with a simulated resultfrom the FEM analysis and a computation of the energy of the system. The capacitance values are1.66 and 1.61 pF, respectively. The dielectric characteristics of the fabricated in-plane-polarizedlead-zirconate-titanate (PZT) transducers are also tested. The calculated result (3.42 nF) is closeto the measured value (3.27 nF).
机译：分析了平面极化铁电换能器的介电特性，并提出了等效模型。具有叉指电极（IDE）的铁电换能器的几何结构被对称简化，并使用有限元方法（FEM）分析电场分布。有限元分析结果表明，电极之间的内部铁电薄膜的电场分布在面内方向上是均匀的，并且在电极下方的空气和内部铁电薄膜中的电场效应可以忽略不计。从结果中得出模型，并通过将使用模型计算的电容值与FEM分析和系统能量计算的模拟结果进行比较，验证模型的有效性。电容值分别为1.66和1.61 pF。还测试了制造的面内极化的锆钛酸铅（PZT）换能器的介电特性。计算结果（3.42 nF）接近测量值（3.27 nF）。

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