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首页> 外文期刊>日本セラミックス協会学術論文誌 >Refinement of #beta#-Si_3N_4 Single Crystal Grown from Silicon Melt
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Refinement of #beta#-Si_3N_4 Single Crystal Grown from Silicon Melt

机译:硅熔体生长的#beta#-Si_3N_4单晶的改进

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摘要

Silicon powder in a reaction-sintered silicon nitride crucible was heated at 1600 deg C in a nitrogen atomosphere. Clustered #beta#-Si_3N_4 single crystals were obtained in residual silicon metal after cooling. The silicon residuals were dissolved by chemical purification using a mixture of aqueous HF and HNO_3, and subsequently treated and with H_2SO_4. Scanning electron microscopy observation showed that large #beta#-Si_3N_4 crystals without Si residuals could be successfully separated by this process.
机译:将反应烧结的氮化硅坩埚中的硅粉在氮气氛中在1600℃下加热。冷却后,在残留的硅金属中获得簇状的#beta#-Si_3N_4单晶。硅残留物通过使用HF和HNO_3水溶液的混合物进行化学纯化而溶解,然后用H_2SO_4处理。扫描电子显微镜观察表明,通过该过程可以成功地分离出没有Si残留的大的#beta#-Si_3N_4晶体。

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