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Production and performance of multilayer-coated conical x-ray mirrors

机译:多层涂层锥形X射线反射镜的生产和性能

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摘要

A method of fabricating replica figured x-ray optics with integral multilayer coatings is presented. With the intact electroforming multilayer process (IEMP) technique, we sputter multilayers onto a reusable superpolished mandrel, electroform nickel over the multilayers, and remove the multilayer-coated nickel shell intact from the mandrel. This approach offers advantages over more traditional, original, and segmented-replica fabrication techniques, including low cost; compatibility with a wide range of mirror designs, diameters, and focal lengths; simple integration with multilayer sputtering processes; and the ability to produce complete shells of revolution. The fabrication of W/Si multilayer-coated 10-cm-diameter conical x-ray mirrors is described, as are reflectivity measurements at 10 and 30 keV. The measured reflectivity of the IEMP multilayers at the 10-keV primary Bragg peak was 17%. Measurements of multiple points on the cone showed multilayer uniformity to within a few percent around the mirror.
机译:提出了一种制造带有整体多层涂层的仿形X射线光学器件的方法。使用完整的电铸多层工艺(IEMP)技术,我们将多层溅射到可重复使用的超抛光心轴上,在多层结构上电铸镍,并从心轴上完整地去除多层涂层的镍壳。与传统的,原始的和分段副本的制造技术相比,这种方法具有很多优势,包括低成本。与各种镜子设计,直径和焦距兼容;与多层溅射工艺简单集成;以及生产完整的革命炮弹的能力。描述了W / Si多层镀膜的直径10-cm的锥形X射线反射镜的制造,以及在10和30 keV下的反射率测量。 IEMP多层在10-keV主布拉格峰处测得的反射率为17%。锥体上多个点的测量结果表明,多层均匀性在反射镜周围达到百分之几以内。

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