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Localized self-volume growth in hybrid sol-gel glass induced by ultraviolet radiation with a gray-scale mask

机译:带有灰度掩模的紫外线辐射在混合溶胶-凝胶玻璃中的局部自体生长

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摘要

UV-induced self-volume growth of the hybrid sol-gel glass was investigated for fabrication of an arbitrary-surface relief structure with a user-defined gray scale mask. The gray scale mask was generated through exposure of a high-energy beam-sensitive glass under an electron beam. Saw-tooth gratings of different periods were fabricated by a simple UV exposure through the gray-scale mask. Experimental results showed that the smaller the period is, the shallower the depth obtained owing to the self-volume growth effect is.
机译:为了制造具有用户定义的灰度掩模的任意表面浮雕结构,研究了紫外线诱导的混合溶胶-凝胶玻璃的自体生长。灰度掩模是通过在电子束下曝光高能束敏感玻璃而产生的。通过简单地通过灰度掩模进行紫外线曝光,可以制作出不同周期的锯齿形光栅。实验结果表明,周期越短,由于自体积增长效应所获得的深度越浅。

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