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Determination of Optical Birefringence by Using Off-axis Transmission Ellipsometry

机译:离轴透射椭圆光度法测定光学双折射

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摘要

Utilizing transmission ellipsometry at small angles of incidence, it is shown that c-cut uniaxial samples can be used to determine both the miscut of the optic axis with respect to the plane of incidence as well as very accurate values of the spectroscopic birefringence. For example, wafers of ZnO, LiNbO_3, and 6H-SiC single-crystals are examined and the miscut direction and the spectroscopic birefringence are determined. While all materials show strong dispersion in birefringence, ZnO exhibits a distinct isotropic point at 396.8 nm.
机译:利用在小入射角处的透射椭圆光度法,显示出c切单轴样本可以用于确定光轴相对于入射平面的切分以及光谱双折射的非常准确的值。例如,检查了ZnO,LiNbO_3和6H-SiC单晶的晶片,并确定了误切方向和光谱双折射。尽管所有材料在双折射方面均表现出强分散性,但ZnO在396.8 nm处表现出明显的各向同性点。

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