Ellipsometry of reflected and scattered fields for the analysis of substrate optical quality

Carole Deumie; Oliver Gilbert; Gaelle Georges; Laurent Arnaud; Claude Amra

首页> 外文期刊>Applied optics >Ellipsometry of reflected and scattered fields for the analysis of substrate optical quality

【24h】

Ellipsometry of reflected and scattered fields for the analysis of substrate optical quality

机译：反射和散射场的椭偏仪用于分析基板的光学质量

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

Specular ellipsometry is a well-known and efficient technique to characterize surfaces and coatings. This technique has been extended to the measurement of scattered light. We present an experimental setup, using a polarization modulator, which permits us to characterize transition layers and roughness without a calibration procedure. Experimental results are presented concerning transition layers for damage threshold applications and for rough surfaces or bulks.

机译：镜面椭圆仪是一种众所周知的有效表征表面和涂层的技术。该技术已扩展到散射光的测量。我们介绍了使用偏振调制器的实验装置，该装置无需校准即可表征过渡层和粗糙度。给出了有关用于损伤阈值应用以及粗糙表面或块体的过渡层的实验结果。

著录项

来源
《Applied optics》 |2006年第7期|共10页
作者
Carole Deumie; Oliver Gilbert; Gaelle Georges; Laurent Arnaud; Claude Amra;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类
关键词

相似文献

外文文献
中文文献
专利

1. Ellipsometry of reflected and scattered fields for the analysis of substrate optical quality [J] . Carole Deumie, Oliver Gilbert, Gaelle Georges, Applied Optics . 2006,第7期

机译：反射和散射场的椭偏仪用于分析基板的光学质量
2. Membrane characterisation by optical methods: ellipsometry of scattered field [J] . Membrane Technology Group Membrane Technology: An International Newsletter . 2008,第Nova期

机译：光学方法表征膜：散射场的椭偏
3. Reflectance difference spectroscopy RDS/RAS combined with spectroscopic ellipsometry for a quantitative analysis of optically anisotropic materials [J] . Rossow U, Goldhahn R, Fuhrmann A, Physica status solidi, B. Basic research . 2005,第13期

机译：反射差光谱RDS / RAS与椭圆偏振光谱法结合使用，用于光学各向异性材料的定量分析
4. Spectroscopic Ellipsometry Analysis of Optical Coatings on Transparent Substrates [C] . H.G. Tompkins, T. Tiwald, J.A. Woollam Society of Vacuum Coaters Annual Technical Conference; 20070428-0503; Louisville,KY(US) . 2007

机译：透明基板上光学涂层的光谱椭圆偏光分析
5. High-performance germanium photodetectors on silicon reflecting substrates for long-haul optical communications. [D] . Dosunmu, Olufemi Isiade. 2005

机译：硅反射基板上的高性能锗光电探测器，用于长距离光通信。
6. Chiral optical fields: a unified formulation of helicity scattered from particles and dichroism enhancement [O] . Manuel Nieto-Vesperinas -1

机译：手性光学场：从颗粒中散射出来的螺旋度和二色性增强的统一公式
7. Analysis of Reflectance and Transmittance Characteristics of Optical Thin Film for Various Film Materials, Thicknesses and Substrates [O] . Md Sultan Z, Sultana N 2015

机译：不同薄膜材料，厚度和基材的光学薄膜反射率和透射特性分析
8. Optical Studies of Electrode Solution Interfaces. Part I - Complex Plane Analysis in Electrode Modulated Specular Reflectance Studies. Part II - Modulation Ellipsometry and Its Application to the Study of the Electrode-Electrolyte Interface [R] . Adzic, R., Cahan, B. D., Yeager, E., 1972

机译：电极溶液界面的光学研究。第一部分 - 电极调制镜面反射研究中的复平面分析。第二部分 - 调制椭偏法及其在电极 - 电解质界面研究中的应用

Ellipsometry of reflected and scattered fields for the analysis of substrate optical quality

摘要

著录项

相似文献

相关主题

期刊订阅