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Multiscale analysis of the laser-induced damage threshold in optical coatings

机译：光学涂层中激光引起的损伤阈值的多尺度分析

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摘要

We have investigated the influence of laser beam size on laser-induced damage threshold (LIDT) in the case of single- and multiple-shot irradiation. The study was performed on hafnia thin films deposited with various technologies (evaporation, sputtering, with or without ion assistance). LIDT measurements were carried out at 1064nm and 12 ns with a spot size ranging from a few tens to a few hundreds of micrometers, in 1-on-1 and R-on-1 modes. These measurements were compared with simulations obtained with the statistical theory of laser-induced damage caused by initiating inclusions. We show how to obtain information on the initiating defect properties and the related physical damage mechanisms with a multiscale study. Under certain conditions, it is possible with this method to discriminate different defects, estimate their densities, and follow the evolution of the defects under multiple irradiation. The different metrology implications of our approach, particularly for obtaining a functional LIDT of optical components are discussed.
机译：我们已经研究了单次和多次照射时激光束大小对激光诱导损伤阈值（LIDT）的影响。该研究是对采用各种技术（蒸发，溅射，带或不带离子辅助）沉积的氧化f薄膜进行的。 LIDT测量是在1对1模式和R对1模式下，在1064nm和12 ns处进行的，光斑大小范围从几十到几百微米。将这些测量结果与使用统计理论获得的模拟结果进行了比较，该模拟理论是由初始夹杂物引起的激光诱发的损伤。我们展示了如何通过多尺度研究获得有关初始缺陷特性和相关物理损坏机制的信息。在某些条件下，使用这种方法可以区分不同的缺陷，估计其密度，并跟踪多次照射下缺陷的演变。讨论了我们方法的不同度量含义，尤其是对于获得光学组件的功能性LIDT而言。

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