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Measurement of steep aspheric surfaces using an anamorphic probe

机译:使用变形探头测量陡峭的非球面

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Synthetic aperture interferometry has been previously proposed as a possible in-process method to measure a spheric form (R. Tomlinson, et al., Appl. Opt. 42, 701, 2003.). Preliminary demonstration utilized a scanning probe consisting of a pair of bare single mode fibers to perform source and receive functions. It was found that this probe did not have sufficient numerical aperture (NA) to measure steep surfaces and that simply increasing the NA decreases the light gathering efficiency substantially. In this paper, we introduce supplementary optics to increase the NA, and the light gathering efficiency has been increased by adopting an anamorphic design. A spherical test optic of known form is measured to demonstrate the capability of the new probe design. (c) 2008 Optical Society of America.
机译:先前已经提出了合成孔径干涉法作为测量球形形式的可能的加工中方法(R.Tomlinson等人,Appl.Opt.42,701,2003。)。初步演示使用了由一对裸露的单模光纤组成的扫描探针来执行源和接收功能。发现该探针没有足够的数值孔径(NA)来测量陡峭的表面,仅仅增加NA会大大降低聚光效率。在本文中,我们引入了辅助光学器件以增加NA,并且通过采用变形设计提高了聚光效率。测量已知形式的球形测试光学器件,以证明新探针设计的功能。 (c)2008年美国眼镜学会。

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