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Distortion compensation in interferometric testing of mirrors

机译:反射镜干涉测试中的失真补偿

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We present a method to compensate for the imaging distortion encountered in interferometric testing of mirrors, which is introduced by interferometer optics as well as from geometric projection errors. Our method involves placing a mask, imprinted with a regular square grid, over the mirror and finding a transformation that relates the grid coordinates to coordinates in the base plane of the parent surface. This method can be used on finished mirrors since no fiducials have to be applied to the surfaces. A critical step in the process requires that the grid coordinates be projected onto the mirror base plane before the regression is performed. We apply the method successfully during a center-of-curvature null test of an F/2 off-axis paraboloid.
机译:我们提出了一种补偿镜子干涉测量中遇到的成像失真的方法,该方法是由干涉仪光学器件以及几何投影误差引入的。我们的方法包括在镜面上放置一个印有规则正方形网格的遮罩,并找到将网格坐标与父曲面的底平面中的坐标相关联的转换。由于不必将基准应用于表面,因此该方法可用于成品反射镜。该过程中的关键步骤要求在执行回归之前将网格坐标投影到镜面基准面上。我们在F / 2离轴抛物面的曲率中心无效测试中成功应用了该方法。

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