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首页> 外文期刊>Applied optics >Hexagonal microlens array fabricated by direct laser writing and inductively coupled plasma etching on organic light emitting devices to enhance the outcoupling efficiency
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Hexagonal microlens array fabricated by direct laser writing and inductively coupled plasma etching on organic light emitting devices to enhance the outcoupling efficiency

机译：通过在有机发光器件上直接激光写入和感应耦合等离子体蚀刻制造的六边形微透镜阵列，以提高输出耦合效率

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摘要

A hexagonal microlens array directly fabricated on an indium tin oxide glass substrate by the combination of direct laser writing and inductively coupled plasma etching is demonstrated to enhance the out-coupling efficiency of the organic light emitting devices, which can avoid the loss of photons and the mechanical and thermal deformations at the glass/microlenses interface. An atomic force microscope measurement indicates the contour of the fabricated hexagonal microlens is nearly an ideal part of a hemisphere. From the comparison with the operating OLED without a microlens array, the outcoupling efficiency is enhanced more than 40percent with the hexagonal microlens array on the glass substrate, and the enhanced emission from the active area of the device with the hexagonal microlens array at the viewing angles from 0 deg to 40 deg can clearly be seen.
机译：通过直接激光刻写和电感耦合等离子体刻蚀相结合，直接在氧化铟锡玻璃基板上制造的六边形微透镜阵列被证明可以提高有机发光器件的输出耦合效率，从而可以避免光子和光子的损失。玻璃/微透镜界面处的机械和热变形。原子力显微镜测量表明所制造的六角形微透镜的轮廓几乎是半球的理想部分。从与没有微透镜阵列的工作OLED的比较来看，玻璃基板上的六边形微透镜阵列的输出耦合效率提高了40％以上，并且具有六边形微透镜阵列的器件在有源区的有源区域发射的发射增强了从0度到40度可以清楚地看到。

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