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Second-order systematic errors in Mueller matrix dual rotating compensator ellipsometry

机译：Mueller矩阵双旋转补偿器椭圆仪中的二阶系统误差

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摘要

We investigate the systematic errors at the second order for a Mueller matrix ellipsometer in the dual rotating compensator configuration. Starting from a general formalism, we derive explicit second-order errors in the Mueller matrix coefficients of a given sample. We present the errors caused by the azimuthal inaccuracy of the optical components and their influences on the measurements. We demonstrate that the methods based on four-zone or two-zone averaging measurement are effective to vanish the errors due to the compensators. For the other elements, it is shown that the systematic errors at the second order can be canceled only for some coefficients of the Mueller matrix. The calibration step for the analyzer and the polarizer is developed. This important step is necessary to avoid the azimuthal inaccuracy in such elements. Numerical simulations and experimental measurements are presented and discussed.
机译：我们研究了双旋转补偿器配置中的Mueller矩阵椭偏仪在二阶系统误差。从一般形式主义开始，我们得出给定样本的Mueller矩阵系数中的显式二阶误差。我们介绍了由光学组件的方位角误差引起的误差及其对测量的影响。我们证明，基于四区或两区平均测量的方法可以有效地消除由于补偿器引起的误差。对于其他元素，表明仅对于穆勒矩阵的某些系数，才能消除二阶系统误差。开发了检偏器和偏振器的校准步骤。必须采取这一重要步骤来避免此类元素的方位误差。提出并讨论了数值模拟和实验测量。

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