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Height measurement of transparent objects by adopting differential interference contrast technology

机译：采用微分干涉对比技术测量透明物体的高度

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摘要

In this study, the differential interference contrast (DIC) approach originally used for image enhancement to increase the contrast between a transparent object and the background is adopted for the dimension measurement of transparent structures. With the phase difference image retrieved using the DIC technique, the phase map of the examined object can be approximated by integrating the phase difference. The need of integration accuracy is much higher for measurement than for image enhancement. In this study, a modified Fourier phase integration is proposed to reduce the effects of noise on surface profile reconstruction. The simulation results show that the proposed approach can effectively reduce the effects of noise. Experimental results are also conducted to study the feasibility of using the transmitted DIC with the proposed integration method for transparent object measurement. The results show that the height of a transparent structure measured using the DIC method is quite close to those measured using an atomic force microscope, while those measured using the white-light interference method result in a much larger measurement than all others.
机译：在这项研究中，最初用于图像增强以增加透明对象与背景之间的对比度的微分干涉对比（DIC）方法被用于透明结构的尺寸测量。通过使用DIC技术检索到的相位差图像，可以通过对相位差进行积分来近似检查对象的相位图。与图像增强相比，测量所需的集成精度要高得多。在这项研究中，提出了一种改进的傅立叶相位积分，以减少噪声对表面轮廓重建的影响。仿真结果表明，该方法可以有效降低噪声的影响。还进行了实验结果，以研究将透射式DIC与建议的集成方法用于透明物体测量的可行性。结果表明，使用DIC方法测得的透明结构的高度与使用原子力显微镜测得的高度非常接近，而使用白光干涉法测得的透明结构的高度要比所有其他方法大得多。

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