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Application of maximum likelihood reconstruction of subaperture data for measurement of large flat mirrors

机译：子孔径数据的最大似然重建在大型平面镜测量中的应用

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摘要

Interferometers accurately measure the difference between two wavefronts, one from a reference surface and the other from an unknown surface. If the reference surface is near perfect or is accurately known from some other test, then the shape of the unknown surface can be determined. We investigate the case where neither the reference surface nor the surface under test is well known. By making multiple shear measurements where both surfaces are translated and/or rotated, we obtain sufficient information to reconstruct the figure of both surfaces with a maximum likelihood reconstruction method. The method is demonstrated for the measurement of a 1.6 m flat mirror to 2 nm rms, using a smaller reference mirror that had significant figure error.
机译：干涉仪可准确测量两个波前之间的差异，一个来自参考表面，另一个来自未知表面。如果参考表面接近完美或可以通过其他测试准确知道，则可以确定未知表面的形状。我们研究了既不熟悉参考面也不了解被测面的情况。通过在两个表面都平移和/或旋转的位置进行多次剪切测量，我们获得了足够的信息，可以使用最大似然重建方法来重建两个表面的图形。演示了该方法可用于测量1.6 m平面镜至2 nm rms的情况，该方法使用具有明显图形误差的较小参考镜进行。

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