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首页> 外文期刊>Applied optics >Linear diffraction grating interferometer with high alignment tolerance and high accuracy
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Linear diffraction grating interferometer with high alignment tolerance and high accuracy

机译：具有高对准公差和高精度的线性衍射光栅干涉仪

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摘要

We present an innovative structure of a linear diffraction grating interferometer as a long stroke and nanometer resolution displacement sensor for any linear stage. The principle of this diffractive interferometer is based on the phase information encoded by the +-1st order beams diffracted by a holographic grating. Properly interfering these two beams leads to modulation similar to a Doppler frequency shift that can be translated to displacement measurements via phase decoding. A self-compensation structure is developed to improve the alignment tolerance. LightTool analysis shows that this new structure is completely immune to alignment errors of offset, standoff, yaw, and roll. The tolerance of the pitch is also acceptable for most installation conditions. In order to compact the structure and improve the signal quality, a new optical bonding technology by mechanical fixture is presented so that the miniature optics can be permanently bonded together without an air gap in between. For the output waveform signals, a software module is developed for fast real-time pulse counting and phase subdivision. A laser interferometer HP5529A is employed to test the repeatability of the whole system. Experimental data show that within 15 mm travel length, the repeatability is within 15 nm.
机译：我们提出了一种线性衍射光栅干涉仪的创新结构，作为任何线性平台的长行程和纳米分辨率位移传感器。该衍射干涉仪的原理基于由全息光栅衍射的+1级光束编码的相位信息。适当地干涉这两个光束会导致类似于多普勒频移的调制，该调制可以通过相位解码转换为位移测量。开发了一种自补偿结构以提高对准公差。 LightTool分析表明，这种新结构完全不受偏移，支座，偏航和侧倾的对准误差的影响。在大多数安装条件下，螺距的公差也是可以接受的。为了使结构紧凑并改善信号质量，提出了一种通过机械夹具的新型光学粘合技术，从而可以将微型光学器件永久粘合在一起，而两者之间没有空气间隙。对于输出波形信号，开发了一个软件模块，用于快速实时脉冲计数和相位细分。激光干涉仪HP5529A用于测试整个系统的可重复性。实验数据表明，在15 mm的行程长度内，可重复性在15 nm以内。

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