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Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method

机译:使用改进的行星旋转方法优化离子束溅射系统中的涂层均匀性

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A modified planetary rotation system has been developed to obtain high uniformity optical coatings on large substrates in an ion beam sputter coater. The system allows the normally fixed sun gear to rotate, thus allowing an extra degree of freedom and permitting more complex motions to be used. By moving the substrate platen between two fixed positions around the sun axis, averaging of the distributions at these two positions takes place and improved uniformity can be achieved. A peak-to-valley radial uniformity of approx0.15percent (approx0.07percent rms) on a single layer film on a 400 mm diameter substrate has been achieved without the aid of masking.
机译:已经开发出一种改进的行星旋转系统,以在离子束溅射镀膜机中的大型基板上获得高均匀性的光学镀膜。该系统允许正常固定的太阳轮旋转,从而允许额外的自由度并允许使用更复杂的运动。通过围绕太阳轴在两个固定位置之间移动基板压板,可以在这两个位置上平均分布,并可以提高均匀性。在不借助掩膜的情况下,在直径为400 mm的基板上的单层薄膜上,达到了峰谷径向均匀性,约为0.15%(均方根值约为0.07%)。

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