• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied optics >Method to test rotationally asymmetric surface deviation with high accuracy
【24h】

Method to test rotationally asymmetric surface deviation with high accuracy

机译：高精度测试旋转不对称表面偏差的方法

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

We have proposed a new absolute method to test rotationally asymmetric surface deviation. Relying on the high accuracy of Zernike polynomial fitting with least-squares algorithm for the low-frequency component and preserving the high-frequency component with the averaging method, the new method can guarantee the high accuracy of the measurement result with fewer rotational measurements compared to the traditional multiangle averaging method. It realizes a balance between the accuracy and efficiency of the measurements. It has been verified by experiments; the root mean square (rms) of residual figure between the two methods is approx0.6 nm. Meanwhile, the new method can suppress environmental noise introduced in measurement results well.
机译：我们提出了一种新的绝对方法来测试旋转不对称表面偏差。依靠最小二乘算法对低频分量的Zernike多项式拟合的高精度，并通过平均方法保留高频分量，与旋转测量相比，新方法可以保证测量结果的高精度，与传统的多角度平均方法。它实现了测量精度和效率之间的平衡。已经通过实验验证;两种方法之间残差图的均方根（rms）约为0.6 nm。同时，该新方法可以很好地抑制测量结果中引入的环境噪声。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号