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Assembly and evaluation of a pyroelectric detector bonded to vertically aligned multiwalled carbon nanotubes over thin silicon

机译:结合在薄硅上垂直排列的多壁碳纳米管的热释电探测器的组装和评估

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摘要

A novel pyroelectric detector consisting of a vertically aligned nanotube array on thin silicon (VANTA/Si) bonded to a 60 μm thick crystal of LiTaO_3 has been fabricated. The performance of the VANTA/Sicoated pyroelectric detector was evaluated using National Physical Laboratory's (NPL's) detector-characterization facilities. The relative spectral responsivity of the detector was found to be spectrally flat in the 0.8-24 μm wavelength range, in agreement with directional-hemispherical reflectance measurements of witness samples of the VANTA. The spatial uniformity of response of the test detector exhibited good uniformity, although the nonuniformity increased with increasing modulation frequency. The nonuniformity may be assigned either to the dimensions of the VANTA or the continuity of the bond between the VANTA/Si coating and the pyroelectric crystal substrate. The test detector exhibited a small superlinear response, which is similar to that of pyroelectric detectors coated with good quality gold-black coatings.
机译:一种新型的热释电探测器,由在硅上垂直排列的纳米管阵列(VANTA / Si)组成,该阵列结合到60微米厚的LiTaO_3晶体上。使用美国国家物理实验室(NPL)的检测器特性化设备评估了VANTA /弧形热释电检测器的性能。发现检测器的相对光谱响应度在0.8-24μm波长范围内光谱平坦,这与VANTA见证样品的定向半球反射率测量结果一致。尽管检测器响应的空间均匀性随调制频率的增加而增加,但仍表现出良好的均匀性。该不均匀性可以被分配给VANTA的尺寸,或者被分配给VANTA / Si涂层和热电晶体衬底之间的键的连续性。测试探测器表现出较小的超线性响应,这类似于涂有优质金黑涂层的热释电探测器的响应。

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