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Further investigations on fixed abrasive diamond pellets used for diminishing mid-spatial frequency errors of optical mirrors

机译：用于减少光学镜的中空频率误差的固定金刚石磨粒的进一步研究

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摘要

As further application investigations on fixed abrasive diamond pellets (FADPs), this work exhibits their potential capability for diminishing mid-spatial frequency errors (MSFEs, i.e., periodic small structure) of optical surfaces. Benefitting from its high surficial rigidness, the FADPs tool has a natural smoothing effect to periodic small errors. Compared with the previous design, this proposed new tool employs more compliance to aspherical surfaces due to the pellets being mutually separated and bonded on a steel plate with elastic back of silica rubber adhesive. Moreover, a unicursal Peano-like path is presented for improving MSFEs, which can enhance the multidirectionality and uniformity of the tool's motion. Experiments were conducted to validate the effectiveness of FADPs for diminishing MSFEs. In the lapping of a Φ = 420 mm Zerodur paraboloid workpiece, the grinding ripples were quickly diminished (210 min) by both visual inspection and profile metrology, as well as the power spectrum density (PSD) analysis, RMS was reduced from 4.35 to 0.55 μm. In the smoothing of a Φ = 101 mm fused silica work-piece, MSFEs were obviously improved from the inspection of surface form maps, interferometric fringe patterns, and PSD analysis. The mid-spatial frequency RMS was diminished from 0.017λ to 0.014λ (λ = 632.8 nm).
机译：作为对固定磨料金刚石颗粒（FADP）的进一步应用研究，这项工作显示出其减小光学表面的中空间频率误差（MSFE，即周期性小结构）的潜在能力。得益于其较高的表面刚度，FADPs工具对周期性的小误差具有自然的平滑效果。与以前的设计相比，此提议的新工具对非球面具有更高的柔韧性，这是因为颗粒相互分离并通过具有硅胶橡胶背胶的弹性钢板粘合在钢板上。此外，提出了一种类似于Peano的单曲线路径，以改善MSFE，这可以增强工具运动的多方向性和均匀性。进行实验以验证FADP减少MSFE的有效性。在Φ= 420 mm Zerodur抛物面工件的研磨中，通过目视检查和轮廓计量以及功率谱密度（PSD）分析，磨削波纹迅速减小（210分钟），RMS从4.35降低到0.55微米在对Φ= 101 mm熔融石英工件进行平滑处理时，通过检查表面形状图，干涉条纹图案和PSD分析，明显改善了MSFE。中空间频率RMS从0.017λ减小到0.014λ（λ= 632.8 nm）。

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