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Mid-infrared Mueller ellipsometer with pseudo-achromatic optical elements

机译:具有伪消色差光学元件的中红外Mueller椭圆仪

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The purpose of this article is to present a new broadband Mueller ellipsometer designed to work in the mid-infrared range, from 3 to 14 mu m. The Mueller ellipsometer, which can be mounted in reflection or in transmission configuration, consists of a polarization state generator (PSG), a sample holder, and a polarization state analyzer (PSA). The PSG consists of one linear polarizer and a retarder sequentially rotated to generate a set of four optimal polarization states. The retarder consists of a biprism made of two identical Fresnel rhombs disposed symmetrically and joined by an optical contact, giving the ensemble a "V" shape. Retardation is induced by the four total internal reflections that the beam undergoes when it propagates through the biprism. Total internal reflection allows the generation of a quasi-achromatic retardation. The PSA is identical to the PSG, but with its optical elements mounted in reverse order. After a measurement run, the instrument yields a set of sixteen independent values, which is the minimum amount of data required to calculate the Mueller matrix of the sample. The design of the Mueller ellipsometer is based on the optimization of an objective criterion that allows for minimizing the propagation of errors from raw data to the Mueller matrix of the sample. The pseudo-achromatic optical elements ensure a homogeneous quality of the measurements for all wavelengths. The performance of the Mueller ellipsometer, in terms of precision and accuracy, is discussed and illustrated with a few examples. (C) 2015 Optical Society of America
机译:本文的目的是介绍一种新的宽带Mueller椭圆仪,其设计用于3至14μm的中红外范围。穆勒椭圆仪可以以反射或透射配置安装,由偏振态发生器(PSG),样品架和偏振态分析仪(PSA)组成。 PSG由一个线性偏振器和一个延迟器组成,依次旋转以生成一组四个最佳偏振态。缓速器由双棱镜组成,该双棱镜由两个相同的菲涅耳菱形对称地布置,并通过光学触点连接,从而使整体呈“ V”形。光束通过双棱镜传播时,光束会经历四次全内反射,从而导致延迟。全内反射可以产生准消色差延迟。 PSA与PSG相同,但光学元件的安装顺序相反。测量运行后,仪器会产生一组十六个独立值,这是计算样品的Mueller矩阵所需的最小数据量。 Mueller椭圆仪的设计基于客观标准的优化,该目标标准可将误差从原始数据传播到样品的Mueller矩阵的可能性降至最低。伪消色差光学元件可确保所有波长的测量质量均一。穆勒椭偏仪的精度和准确度方面的性能将通过几个示例进行讨论和说明。 (C)2015年美国眼镜学会

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