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Detection method of inclination angle in image measurement based on improved triangulation

机译:基于改进三角剖分的图像测量倾斜角检测方法

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Image distortion seriously affects the accuracy in microscope image measurement. One source of such distortion is related to the tilting of the microscope stage during laser scanning, thereby resulting in various degrees of inclination angles. This paper describes a novel technique that improves the traditional laser triangulation method by using multiple parallel laser beams that can solve the inclination problem. Moreover, a multi-light-spot measurement device, based on the improved laser triangulation technique, is proposed that can accurately detect the degree and directions of the inclination angles in real time. Furthermore, experimental results generated from a prototype of this device show that the new measurement system can effectively detect small inclination angles at a precision up to +/- 0.5 mu rad. (C) 2015 Optical Society of America
机译:图像失真严重影响显微镜图像测量的准确性。这种畸变的一个来源与显微镜台在激光扫描期间的倾斜有关,从而导致各种程度的倾斜角。本文介绍了一种新颖的技术,它通过使用多个平行激光束来解决倾斜问题,从而改进了传统的激光三角测量方法。此外,提出了一种基于改进的激光三角测量技术的多光点测量装置,该装置可以实时准确地检测倾斜角度和角度。此外,从该设备的原型产生的实验结果表明,新的测量系统可以有效地检测小倾角,精度达+/- 0.5μrad。 (C)2015年美国眼镜学会

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