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Performance improvement in silicon arrayed waveguide grating by suppression of scattering near the boundary of a star coupler

机译:通过抑制星型耦合器边界附​​近的散射来提高硅阵列波导光栅的性能

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We investigate the reduction of transition loss across the star coupler boundary in a silicon arrayed waveguide grating (AWG) by suppressing multimode generation and scattering near the boundary of a star coupler. Eight-channel silicon AWGs were designed with optimal conditions based on enhanced field matching in combination with ultrashallow etched structures. The fabricated AWG demonstrates an insertion loss down to 0.63 dB with a cross talk of -23 to -25.3 dB, exhibiting similar to 0.8 dB improvement of insertion loss and similar to 4 dB improvement of cross talk compared to the Si AWG fabricated with a conventional double-etch technique. (C) 2015 Optical Society of America
机译:我们通过抑制多模产生和星型耦合器边界附​​近的散射,研究了硅阵列波导光栅(AWG)中星型耦合器边界上过渡损耗的降低。基于增强的场匹配和超浅蚀刻结构,在最佳条件下设计了八通道硅AWG。制成的AWG的插入损耗低至0.63 dB,串扰为-23至-25.3 dB,与传统的Si AWG相比,插入损耗的改善约0.8 dB,串扰的改善约4 dB双蚀刻技术。 (C)2015年美国眼镜学会

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