• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied optics >Dynamic properties of a metal photo-thermal micro-actuator
【24h】

Dynamic properties of a metal photo-thermal micro-actuator

机译：金属光热微致动器的动态特性

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

This work presents the design, modeling, simulation, and characterization of a metal bent-beam photo-thermal micro-actuator. The mechanism of actuation is based on the thermal expansion of the microactuator which is irradiated by a laser, achieving noncontact control of the power supply. Models for micro-actuators were established and finite-element simulations were carried out to investigate the effects of various parameters on actuation properties. It is found that the thermal expansion coefficient, thermal conductivity, and the geometry size largely affected actuation behavior whereas heat capacity, density, and Young's modulus did not. Experiments demonstrated the dynamic properties of a Ni micro-actuator fabricated via LIGA technology with 1100/30/100 mu m (long/wide/thick) arms. The tip displacement of the micro-actuator could achieve up to 42 mu m driven by a laser beam (1064 nm wavelength, 1.2 W power, and a driving frequency of 1 HZ). It is found that the tip displacement decreases with increasing laser driving frequency. For 8 Hz driving frequency, 17 mu m(peak-valley value) can be still reached, which is large enough for the application as micro-electro-mechanical systems. Metal photo-thermal micro actuators have advantages such as large displacement, simple structure, and large temperature tolerance, and therefore they will be promising in the fields of microanotechnology. (C) 2015 Optical Society of America
机译：这项工作介绍了金属弯曲束光热微致动器的设计，建模，仿真和表征。致动的机理是基于由激光照射的微致动器的热膨胀，从而实现电源的非接触式控制。建立了微执行器模型，并进行了有限元模拟，以研究各种参数对执行器性能的影响。发现热膨胀系数，热导率和几何尺寸在很大程度上影响致动行为，而热容，密度和杨氏模量则没有。实验表明，采用LIGA技术制造的具有1100/30/100μm（长/宽/厚）臂的Ni微致动器的动态特性。通过激光束（1064 nm波长，1.2 W功率和1 HZ的驱动频率）驱动，微致动器的尖端位移可以达到42μm。发现随着激光驱动频率的增加，尖端位移减小。对于8 Hz的驱动频率，仍然可以达到17μm（峰谷值），对于作为微机电系统的应用而言，这足够大。金属光热微致动器具有位移大，结构简单，温度容限大等优点，因此在微/纳米技术领域将是有希望的。 （C）2015年美国眼镜学会

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号