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Designing optical metamaterial with hyperbolic dispersion based on an Al:ZnO/ZnO nano-layered structure using the atomic layer deposition technique

机译:使用原子层沉积技术设计基于Al:ZnO / ZnO纳米层结构的双曲线色散光学超材料

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Nano-layered Al:ZnO/ZnO hyperbolic dispersion metamaterial with a large number of layers was fabricated using the atomic layer deposition (ALD) technique. Experimental dielectric functions for Al:ZnO/ZnO structures are obtained by an ellipsometry technique in the visible and near-infrared spectral ranges. The theoretical modeling of the Al:ZnO/ZnO dielectric permittivity is done using effective medium approximation. A method for analysis of spectroscopic ellipsometry data is demonstrated to extract the optical permittivity for this highly anisotropic nano-layered metamaterial. The results of the ellipsometry analysis show that Al:ZnO/ZnO structures with a 1: 9 ALD cycle ratio exhibit hyperbolic dispersion transition change near 1.8 mu m wavelength. (C) 2016 Optical Society of America
机译:利用原子层沉积(ALD)技术制备了具有大量层的纳米层Al:ZnO / ZnO双曲线分散超材料。 Al:ZnO / ZnO结构的实验介电功能是通过椭圆偏振技术在可见光和近红外光谱范围内获得的。 Al:ZnO / ZnO介电常数的理论模型是使用有效的介质近似进行的。证明了一种用于分析椭圆偏振光谱数据的方法,可以提取这种高度各向异性的纳米层超材料的介电常数。椭圆偏振分析的结果表明,具有1:9 ALD循环比的Al:ZnO / ZnO结构在1.8μm波长附近表现出双曲线色散过渡变化。 (C)2016美国眼镜学会

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