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Computational method for simulation of thermal load distribution in a lithographic lens

机译:用于模拟平版印刷镜头中热负荷分布的计算方法

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As a crucial step for thermal aberration prediction, thermal simulation is an effective way to acquire the temperature distribution of lenses. In the case of rigorous thermal simulation with the finite volume method, the amount of absorbed energy and its distribution within lens elements should be provided to guarantee simulation accuracy. In this paper, a computational method for simulation of thermal load distribution concerning lens material absorption was proposed based on light intensity of lens elements' surfaces. An algorithm for the verification of the method was also introduced, and the results showed that the method presented in this paper is an effective solution for thermal load distribution in a lithographic lens. (C) 2016 Optical Society of America
机译:作为热像差预测的关键步骤,热模拟是获取镜头温度分布的有效方法。在使用有限体积方法进行严格的热模拟的情况下,应提供吸收能量的量及其在透镜元件内的分布,以确保模拟精度。本文提出了一种基于镜片元件表面光强度的模拟热负荷分布的计算方法。还介绍了该方法的验证算法,结果表明,本文提出的方法是一种有效的解决方案,用于光刻透镜中的热负荷分布。 (C)2016美国眼镜学会

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