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首页> 外文期刊>Nanotechnology >Polycarbonate-based ordered arrays of electrochemical nanoelectrodes obtained by e-beam lithography
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Polycarbonate-based ordered arrays of electrochemical nanoelectrodes obtained by e-beam lithography

机译：通过电子束光刻技术获得的基于聚碳酸酯的电化学纳米电极有序阵列

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摘要

Ordered arrays of nanoelectrodes for electrochemical use are prepared by electron beam lithography (EBL) using polycarbonate as a novel e-beam resist. The nanoelectrodes are fabricated by patterning arrays of holes in a thin film of polycarbonate spin-coated on a gold layer on Si/Si_3N_4 substrate. Experimental parameters for the successful use of polycarbonate as high resolution EBL resist are optimized. The holes can be filled partially or completely by electrochemical deposition of gold. This enables the preparation of arrays of nanoelectrodes with different recession degree and geometrical characteristics. The polycarbonate is kept on-site and used as the insulator that separates the nanoelectrodes. The obtained nanoelectrode arrays (NEAs) exhibit steady state current controlled by pure radial diffusion in cyclic voltammetry for scan rates up to approximately 50 mVs~(-1). Electrochemical results showed satisfactory agreement between experimental voltammograms and suitable theoretical models. Finally, the peculiarities of NEAs versus ensembles of nanoelectrodes, obtained by membrane template synthesis, are critically evaluated.
机译：使用聚碳酸酯作为新型电子束抗蚀剂，通过电子束光刻（EBL）制备用于电化学用途的有序纳米电极阵列。纳米电极是通过对在Si / Si_3N_4基板上的金层上旋涂的聚碳酸酯薄膜中的孔阵列进行构图来制造的。优化了成功将聚碳酸酯用作高分辨率EBL抗蚀剂的实验参数。可以通过金的电化学沉积来部分或完全填充孔。这使得能够制备具有不同凹进度和几何特性的纳米电极阵列。聚碳酸酯保留在现场，并用作分隔纳米电极的绝缘体。所获得的纳米电极阵列（NEA）在循环伏安法中表现出由纯径向扩散控制的稳态电流，扫描速率高达约50 mVs〜（-1）。电化学结果表明，实验伏安图和合适的理论模型之间具有令人满意的一致性。最后，对通过膜模板合成获得的NEA与纳米电极整体的特性进行了严格的评估。

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