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The importance of the energetic species in pulsed laser deposition for nanostructuring

机译：高能物质在脉冲激光沉积中对纳米结构的重要性

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This work reports on the optical and structural properties of nanostructured films formed by Ag nano-objects embedded in amorphous aluminium oxide (a-Al _2O _3) prepared by alternate pulsed laser deposition (PLD). The aim is to understand the importance of the energetic species involved in the PLD process for nanostructuring, i.e.for organizing nanoparticles (NPs) in layers or for self-assembling them into nanocolumns (NCls), all oriented perpendicular to the substrate. In order to change the kinetic energy of the species arriving at the substrate, we use a background gas during the deposition of the embedding a-Al _2O _3 host. It was produced either in vacuum or in a gas pressure (helium and argon) while the metal NPs were always produced in vacuum. The formation of NPs or NCls is easily identified through the features of the surface plasmon resonances (SPR) in the extinction spectra and confirmed by electron microscopy. The results show that both the layer organization and self-assembling of the metal are prevented when the host is produced in a gas pressure. This result is discussed in terms of the deceleration of species arriving at the substrate in gas that reduces the metal sputtering by host species (by ≈58%) as well as the density of the host material (by 19%). These reductions promote the formation of large voids along which the metal easily diffuses, thus preventing organization and self-organisation, as well as an enhancement of the amount of metal that is deposited.
机译：这项工作报告的纳米结构薄膜的光学和结构性质是由嵌入在通过交替脉冲激光沉积（PLD）制备的非晶氧化铝（a-Al _2O _3）中的Ag纳米物体形成的。目的是了解参与PLD过程的高能物质对于纳米结构的重要性，即对于将纳米颗粒（NPs）分层组织或将其自组装成纳米柱（NCls）都必须垂直于基材。为了改变到达衬底的物质的动能，我们在嵌入a-Al _2O _3主体的沉积过程中使用背景气体。它是在真空或气压（氦气和氩气）下生产的，而金属NP总是在真空下生产的。 NPs或NCls的形成很容易通过消光光谱中的表面等离振子共振（SPR）的特征进行识别，并通过电子显微镜确认。结果表明，当在气体压力下生产基质时，金属的层组织和自组装都受到阻止。根据气体中到达物质的物质的减速度来讨论此结果，气体的减速度使基质物质对金属的溅射作用降低了约58％，基质材料的密度降低了19％。这些减少促进形成大的空隙，金属容易沿着该空隙扩散，从而防止组织和自组织，并且增加了沉积的金属量。

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