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Nanorings and nanocrescents formed via shaped nanosphere lithography: A route toward large areas of infrared metamaterials

机译:通过成形的纳米球光刻技术形成的纳米环和纳米月牙:通向大面积红外超材料的途径

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This paper presents a new approach to nanosphere lithography, which overcomes undesirable manufacturing issues such as complex tilted-rotary evaporation and ion beam milling. A key innovation in this process is the use of non-conductive edge strips placed on top of the samples prior to metal removal. Such elements help to direct the flow of reactive ions during plasma etching and produce well-ordered arrays of metallic nanorings and nanocrescents over large areas of ~1 cm~2. The obtained highly uniform nanocrescent array exhibits an electric resonance of 1.7 μm and a magnetic resonance of 3 μm. The absorption resonances of the fabricated nanorings depend on their diameters and shift toward shorter wavelengths (λ = 1.7 μm for d _o = 308 nm) as compared to larger rings (λ = 2.2 μm d _o = 351 nm). FDTD-based simulations match well with the experimental results. This 'shaped nanosphere lithography' approach creates opportunities to generate nanorings and nanocrescents that promise potential applications in chemical and biological sensing, for surface enhanced spectroscopy and in the field of infrared metamaterials.
机译:本文提出了一种新的纳米球光刻方法,该方法克服了不良的制造问题,例如复杂的倾斜旋转蒸发和离子束铣削。此过程中的一项关键创新是在去除金属之前,将不导电的边缘条放置在样品顶部。这些元素有助于在等离子蚀刻过程中引导反应离子的流动,并在〜1 cm〜2的大面积区域上形成排列整齐的金属纳米环和纳米月牙阵列。所获得的高度均匀的纳米新月形阵列表现出1.7μm的共振和3μm的磁共振。与较大的环(λ= 2.2μmd = 351 nm)相比,制造的纳米环的吸收共振取决于它们的直径并向较短的波长偏移(对于d = 308 nm,λ= 1.7μm)。基于FDTD的模拟与实验结果非常吻合。这种“成形的纳米球光刻”方法为生成纳米环和纳米月牙创造了机会,这些纳米环和纳米月牙有望在化学和生物传感,表面增强光谱学和红外超材料领域中潜在应用。

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