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Fabrication of single and coupled metallic nanocantilevers and their nanomechanical response at resonance

机译：单个和耦合金属纳米悬臂的制造及其在共振时的纳米力学响应

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摘要

We fabricate and explore the resonance characteristics of self-supporting thin film based metallic nanocantilever systems. Nanocantilevers of Au and Ag are fabricated from self-supporting (polycrystalline) thin films (～100 nm) grown via a surfactant mediated process. Focused ion beam assisted milling and manipulation techniques are used to fabricate the nanocantilevers. The resonance characteristics of the cantilevers are investigated by the piezoelectric base excitation method and the frequencies of their first resonance modes are determined by digitally processing and analysing scanning electron microscopy images captured during the study. The resonance characteristics of the nanocantilevers are observed to deviate from the Euler-Bernoulli description. We suggest a polynomial expression to describe the peculiar dimensional dependence of resonance frequency of a mechanically vibrating nanocantilever, where the zeroth order term in the polynomial expression represents an Euler-Bernoulli like form. We also demonstrate a fabrication and measurement technique for an elastically coupled Au nanocantilever system and analysis of its vibration characteristics by means of an analogous mass-spring system.
机译：我们制造和探索基于自支撑薄膜的金属纳米悬臂梁系统的共振特性。 Au和Ag的纳米悬臂是通过表面活性剂介导的过程生长的自支撑（多晶）薄膜（约100 nm）制成的。聚焦离子束辅助铣削和操纵技术用于制造纳米悬臂梁。悬臂梁的共振特性通过压电基础激励方法进行研究，并通过对研究过程中捕获的扫描电子显微镜图像进行数字处理和分析来确定其第一共振模式的频率。观察到纳米悬臂梁的共振特性偏离了Euler-Bernoulli的描述。我们建议一个多项式表达式来描述机械振动的纳米悬臂梁的共振频率的特殊尺寸依赖性，其中多项式表达式中的零阶项表示类似Euler-Bernoulli的形式。我们还演示了弹性耦合金纳米悬臂梁系统的制造和测量技术，并通过类似的质量弹簧系统对其振动特性进行了分析。

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