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Calibration of the torsional and lateral spring constants of cantilever sensors

机译：悬臂传感器的扭转和横向弹簧常数的校准

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摘要

A method suitable for the calibration of the spring constants of all torsional and lateral eigenmodes of micro- and nanocantilever sensors is described. Such sensors enable nanomechanical measurements and the characterization of nanomaterials, for example with atomic force microscopy. The method presented involves the interaction of a flow of fluid from a microchannel with the cantilever beam. Forces imparted by the flow cause the cantilever to bend and induce a measurable change of the torsional and lateral resonance frequencies. From the frequency shifts the cantilever spring constants can be determined. The method does not involve physical contact between the cantilever or its tip and a hard surface. As such it is non-invasive and does not risk damage to the cantilever. Experimental data is presented for two rectangular microcantilevers with fundamental flexural spring constants of 0.046 and 0.154 Nm~(?1). The experimentally determined torsional stiffness values are compared with those obtained by the Sader method. We demonstrate that the torsional spring constants can be readily calibrated using the method with an accuracy of around 15%.
机译：描述了一种适合于校准微悬臂梁传感器和纳米悬臂梁传感器的所有扭转和横向本征模态的弹簧常数的方法。这种传感器能够进行纳米机械测量和纳米材料的表征，例如利用原子力显微镜。提出的方法涉及来自微通道的流体流与悬臂梁的相互作用。由流动施加的力导致悬臂弯曲并引起扭转和横向共振频率的可测量变化。根据频率偏移，可以确定悬臂弹簧常数。该方法不涉及悬臂或其尖端与坚硬表面之间的物理接触。因此，它是非侵入性的，不会冒着损坏悬臂的风险。给出了两个基本挠曲弹簧常数分别为0.046和0.154 Nm〜（？1）的矩形微悬臂梁的实验数据。将实验确定的扭转刚度值与通过Sader方法获得的扭转刚度值进行比较。我们证明了使用该方法可以容易地校准扭转弹簧常数，其精度约为15％。

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