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New organic-inorganic hybrid material based on a poly(amic acid) oligomer: a promising opportunity to obtain microfluidic devices by a photolithographic process

机译:基于聚(酰胺酸)低聚物的新型有机-无机杂化材料:通过光刻工艺获得微流控器件的潜在机会

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摘要

Miniaturized total analysis systems are becoming a powerful tool for analytical and bioanalytical applications. Biological and chemical sensors for health and environmental applications often require adaptable technologies. A flexible and low-cost process using a material with efficient mechanical and thermal properties is necessary. Organic-inorganic hybrid materials offer the advantages of the organic content and the inorganic matrix. In this study, a microfluidic sensor is fabricated on a new hybrid photosensitive material using an accurate and flexible process based on pulsed UV laser lithography. The material is based on poly(amic acid) (PAA) oligomer with lower molecular weight and lower cost, 1,3,5-tris[(2-vinyloxy) ethoxy] benzene (TVEB) as a crosslinking dissolution inhibitor, pre-hydrolysed 4-vinylether-phenyltriethoxysilane (VEPTES) as an organic-inorganic material, and a photoacid generator (PAG). A fine positive pattern is fabricated in a 3 mm thick film with laser writing using 125 mu W energy. The synthesized hybrid material is characterized by nano indentation to analyze the force required to indent the coating and to predict the coating hardness and elastic modulus. Furthermore, thermogravimetric analysis (TGA) and differential scanning calorimetry (DSC) are used to evaluate its thermal stability. Scanning electron microscopy (SEM) is performed to verify the homogeneity of the material. These newly prepared photosensitive hybrid materials can open the way for potential applications in the fabrication of microfluidic devices.
机译:小型化的总分析系统正在成为分析和生物分析应用程序的强大工具。用于健康和环境应用的生物和化学传感器通常需要适应性技术。使用具有有效机械和热性能的材料进行灵活且低成本的过程是必要的。有机-无机杂化材料具有有机含量和无机基质的优点。在这项研究中,使用基于脉冲UV激光光刻技术的精确而灵活的工艺,在新型混合光敏材料上制造了微流体传感器。该材料基于具有较低分子量和成本的聚(酰胺酸)(PAA)低聚物,1,3,5-三[[(2-乙烯基氧基)乙氧基]苯(TVEB)作为交联溶解抑制剂,已预先水解作为有机无机材料的4-乙烯基醚-苯基三乙氧基硅烷(VEPTES)和光酸产生剂(PAG)。使用125μW的能量通过激光写入在3毫米厚的薄膜中制作出精细的正图案。合成的杂化材料具有纳米压痕的特征,可以分析压痕涂层所需的力,并预测涂层的硬度和弹性模量。此外,热重分析(TGA)和差示扫描量热法(DSC)用于评估其热稳定性。进行扫描电子显微镜(SEM)以验证材料的均匀性。这些新制备的光敏杂化材料可以为微流体装置的制造中的潜在应用开辟道路。

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