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首页> 外文期刊>Optics Letters >Perfectly notched long-period fiber grating filter based on ICP dry etching technique
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Perfectly notched long-period fiber grating filter based on ICP dry etching technique

机译：基于ICP干蚀刻技术的完美缺口长周期光纤光栅滤波器

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摘要

This study presents a new process using inductively a coupled plasma dry etching method to manufacture a long-period fiber grating filter with exact period, vertical sidewalls, and smooth etched surfaces, and the filter is thus named a perfectly notched long-period fiber grating (NLPFG). This process can dramatically reduce production time, and thereby provide higher volume production. The fabricated NLPFG has periods of 640 (mu)m, resonant-attenuation wavelengths of 1518 nm, and maximum resonance-attenuation of 21.79 dB. A force induced loss-tunable calibration of the NLPFG filter was implemented, and a monotonically increasing quadratic fitting was observed. The results demonstrated that the proposed NLPFG has a much better period precision compared to corrugated LPFG, and it has great potential for a loss-tunable filter and force transducer applications.
机译：这项研究提出了一种使用电感耦合等离子体干法刻蚀方法制造具有精确周期，垂直侧壁和平滑被刻蚀表面的长周期光纤光栅滤光片的新工艺，因此该滤光片被称为完美缺口的长周期光纤光栅（ NLPFG）。此过程可以大大减少生产时间，从而提供更高的产量。所制造的NLPFG的周期为640μm，共振衰减波长为1518nm，最大共振衰减为21.79dB。对NLPFG滤波器进行了力诱导的损耗可调校准，并观察到单调递增的二次拟合。结果表明，与波纹状LPFG相比，拟议的NLPFG具有更好的周期精度，并且在损耗可调的滤波器和力传感器应用中具有很大的潜力。

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