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Laser ablation of silicon induced by a femtosecond optical vortex beam

机译:飞秒光学涡旋光束诱导的硅激光烧蚀

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摘要

We investigate laser ablation of crystalline silicon induced by a femtosecond optical vortex beam, addressing how beam properties can be obtained by analyzing the ablation crater. The morphology of the surface structures formed in the annular crater surface allows direct visualization of the beam polarization, while analysis of the crater size provides beam spot parameters. We also determine the diverse threshold fluences for the formation of various complex microstructures generated within the annular laser spot on the silicon sample. Our analysis indicates an incubation behavior of the threshold fluence as a function of the number of laser pulses, independent of the optical vortex polarization, in weak focusing conditions. (C) 2015 Optical Society of America
机译:我们研究了飞秒光学涡旋光束诱导的晶体硅的激光烧蚀,解决了如何通过分析烧蚀陨石坑获得光束特性。环形环形坑表面中形成的表面结构的形态可以直接观察光束的偏振,而环形坑大小的分析则可以提供光束点参数。我们还确定了硅样品上环形激光光斑内产生的各种复杂微结构的形成所需的各种阈值注量。我们的分析表明,在弱聚焦条件下,阈值通量的孵育行为随激光脉冲数量的变化而变化,与光学涡旋偏振无关。 (C)2015年美国眼镜学会

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