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Germanium-on-silicon mid-infrared grating couplers with low-reflectivity inverse taper excitation

机译:低反射率反锥形激发的硅上锗锗中红外光栅耦合器

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A broad transparency range of its constituent materials and compatibility with standard fabrication processes make germanium-on-silicon (Ge-on-Si) an excellent platform for the realization of mid-infrared photonic circuits. However, the comparatively large Ge waveguide thickness and its moderate refractive index contrast with the Si substrate hinder the implementation of efficient fiber-chip grating couplers. We report for the first time, to the best of our knowledge, a single-etch Ge-on-Si grating coupler with an inversely tapered access stage, operating at a 3.8 mu m wavelength. Optimized grating excitation yields a coupling efficiency of -11 dB (7.9%), the highest value reported for a mid-infrared Ge-on-Si grating coupler, with reflectivity below -15 dB (3.2%). The large periodicity of our higher-order grating design substantially relaxes the fabrication constraints. We also demonstrate that a focusing geometry allows a 10-fold reduction in inverse taper length, from 500 to 50 mu m. (C) 2016 Optical Society of America
机译:其组成材料的广泛透明度范围以及与标准制造工艺的兼容性,使得硅基锗(Ge-on-Si)成为实现中红外光子电路的绝佳平台。然而,相对较大的Ge波导厚度及其与Si衬底的适度折射率对比阻碍了高效纤维芯片光栅耦合器的实现。据我们所知,我们首次报告了单蚀刻Ge-on-Si光栅耦合器,该光栅耦合器具有反向锥形的访问级,工作波长为3.8μm。优化的光栅激励产生的耦合效率为-11 dB(7.9%),这是中红外Ge-on-Si光栅耦合器的最高值,反射率低于-15 dB(3.2%)。我们高阶光栅设计的大周期性极大地放宽了制造限制。我们还证明了聚焦几何形状可以使反锥度长度减小10倍,从500到50μm。 (C)2016美国眼镜学会

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