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Photoluminescence properties of high-quality ZnO thin films prepared by an RF-magnetron sputtering method

机译:射频磁控溅射法制备高质量ZnO薄膜的光致发光性能

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We have investigated photoluminescence (PL) properties of high-quality ZnO thin films prepared by an RF-magnetron sputtering method. The X-ray-diffraction patterns indicate that the crystalline thin film is preferentially oriented along the [0001] crystal axis. By introducing a low-temperature buffer layer and by growing thin films at a high temperature of 600 degrees C, the crystal quality of ZnO thin films is markedly improved. In addition, we have found that ambience during a cooling process to room temperature after the deposition is another important factor to improve the PL properties; namely, the defect-related PL disappears and the free exciton PL with a sharp width is observed by cooling thin films in the presence of oxygen. Furthermore, under high-density excitation conditions, a PL band due to an exciton-exciton scattering process, the so-called P emission, is observed. (c) 2006 Elsevier B.V. All rights reserved.
机译:我们已经研究了通过射频磁控溅射方法制备的高质量ZnO薄膜的光致发光(PL)特性。 X射线衍射图表明晶体薄膜优选沿[0001]晶轴取向。通过引入低温缓冲层并通过在600℃的高温下生长薄膜,ZnO薄膜的晶体质量得到显着改善。此外,我们发现,沉积后冷却至室温的过程中的环境氛围是改善PL特性的另一个重要因素;即,通过在氧气存在下冷却薄膜,缺陷相关的PL消失并且观察到具有陡峭宽度的自由激子PL。此外,在高密度激发条件下,观察到由于激子-激子散射过程而产生的PL带,即所谓的P发射。 (c)2006 Elsevier B.V.保留所有权利。

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