Iron–oxygen interaction in silicon: A combined XBIC/XRF-EBIC-DLTS study of precipitation and complex building

M. Trushin; O.Vyvenko; W.Seifert; G.Jia; M.Kittler

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Iron–oxygen interaction in silicon: A combined XBIC/XRF-EBIC-DLTS study of precipitation and complex building

机译：硅中的铁-氧相互作用：结合XBIC / XRF-EBIC-DLTS研究沉淀和复杂建筑物

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Iron–oxygen interaction in the Czochralski-grown silicon (CZ-Si) giving rise to their final precipitated state was investigated by means of a combination of electrical and element-sensitive techniques. The samples studied were intentionally contaminated with iron at 1150 1C and then they were annealed at temperatures of 850 and 950 1C to stimulate precipitate formation. Fe-related defect levels in silicon band gap and spatial distributions of iron-related precipitates were monitored after each annealing step. It was found that FeB-pairs being the dominant defects in as-contaminated sample transformed completely to the stable FeO-related complexes that served as precursors for further iron–oxygen coprecipitation.

机译：通过结合电学和元素敏感技术研究了在直拉生长的硅（CZ-Si）中产生最终沉淀态的铁-氧相互作用。所研究的样品在1150 1C时被铁故意污染，然后在850和950 1C的温度下退火，以刺激沉淀形成。在每个退火步骤之后，监测硅带隙中与铁有关的缺陷水平和与铁有关的沉淀物的空间分布。研究发现，FeB对是被污染样品中的主要缺陷，已完全转变为稳定的FeO相关复合物，这些复合物可作为进一步的铁氧共沉淀的前体。

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《Physica, B. Condensed Matter》 |2009年第24期|共4页
作者
M. Trushin; O.Vyvenko; W.Seifert; G.Jia; M.Kittler;
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正文语种 eng
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Silicon; Iron precipitates; Oxygen; DLTS;

机译：硅;铁沉淀;氧;DLTS;

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1. Iron–oxygen interaction in silicon: A combined XBIC/XRF-EBIC-DLTS study of precipitation and complex building [J] . M. Trushin, O.Vyvenko, W.Seifert, Physica, B. Condensed Matter . 2009,第23a24期

机译：硅中的铁-氧相互作用：结合XBIC / XRF-EBIC-DLTS研究沉淀和复杂建筑物
2. Structures, Spectroscopic Properties, and Dioxygen Reactivity of 5- and 6-Coordinate Nonheme Iron(Ⅱ) Complexes: A Combined Enzyme/Model Study of Thiol Dioxygenases [J] . Gordon Jesse B., McGale Jeremy P., Prendergast Joshua R., Journal of the American Chemical Society . 2018,第44期

机译：5和6配位非血红素铁（Ⅱ）配合物的结构，光谱性质和双氧反应性：硫醇双加氧酶的组合酶/模型研究
3. Observation of novel oxygen center dot center dot center dot oxygen interaction in supramolecular assembly of cobalt(III) Schiff base complexes: a combined experimental and computational study [J] . Das Mithun, Ghosh Biswa Nath, Bauza Antonio, RSC Advances . 2015,第89期

机译：钴（III）Schiff碱基复合物超分子组装中新型氧中心点中心点中心点氧相互作用：一种实验和计算研究
4. Iron-oxygen interaction in silicon: A combined XBIC/XRF-EBIC-DLTS study of precipitation and complex building [C] . M. Trushin, O. Vyvenko, W. Seifert, Physica B: Condensed matter . 2009

机译：硅中的铁-氧相互作用：结合XBIC / XRF-EBIC-DLTS研究沉淀和复杂建筑物
5. THE DETERMINATION OF ACTIVITIES AND REACTION RATES IN ALLOY MELTS BY MASSSPECTROMETRIC METHODS: IRON - VANADIUM, COPPER - ALUMINUM, IRON - SILICON, COPPER - SILICON AND IRON - SULFUR - OXYGEN. [D] . WEIDNER, CLARENCE WARREN, JR. 1971

机译：质谱法测定合金熔体的活性和反应速率：铁-钒，铜-铝，铁-硅，铜-硅和铁-硫-氧。
6. A bottom up approach towards artificial oxygenases by combining iron coordination complexes and peptides [O] . Olaf Cussó, Michael W. Giuliano, Xavi Ribas, 2017

机译：通过将铁配位配合物和肽结合起来实现自下而上的人工加氧酶方法
7. Observation of novel oxygen⋯oxygen interaction in supramolecular assembly of cobalt(iii) Schiff base complexes: a combined experimental and computational study [O] . Mithun Das, Biswa Nath Ghosh, Antonio Bauzá, 2015

机译：钴（III）Schiff碱基复合物超分子组装中新型氧气氧相互作用：一种实验和计算研究
8. Carbon-Oxygen Complexes as Nuclei for the Precipitation of Oxygen in Czochralski Silicon. [R] . Oehrlein, G. S., Lindstrom, J. L., Corbett, J. W. 1981

机译：碳氧复合物作为Czochralski硅中氧沉淀的核。

Iron–oxygen interaction in silicon: A combined XBIC/XRF-EBIC-DLTS study of precipitation and complex building

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