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首页> 外文期刊>Physica, B. Condensed Matter >Characterization and room temperature sensing of ammonia and ethanol by thermally oxidized indium films
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Characterization and room temperature sensing of ammonia and ethanol by thermally oxidized indium films

机译：热氧化铟膜对氨和乙醇的表征及室温感测

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摘要

Indium oxide (In_2O_3) films have been prepared by thermal oxidation of vacuum deposited indium (In) films onto glass substrate kept at room temperature (35 °C). The structural, optical and gas sensing properties of films oxidized in air at 400 and 500 °C have been investigated. X-ray diffraction (XRD) measurements indicate that the In _2O_3 films oxidized at these temperatures exhibit a high degree of crystallographic orientation along (2 2 2) plane. Field emission scanning electron microscopy shows large and small grains scattered at the surface of In_2O_3 films. The optical and sensing studies show that In_2O_3 film oxidized at 500 °C exhibits comparatively higher optical band gap of 3.8 eV and large gas response of 92% when exposed to 1000 ppm of ammonia at room temperature. Also an increase in optical absorbance towards ammonia for different concentrations at room temperature has been observed.
机译：通过将真空沉积的铟（In）膜热氧化到保持在室温（35°C）的玻璃基板上，可以制备氧化铟（In_2O_3）膜。研究了在400和500°C的空气中氧化的薄膜的结构，光学和气体传感特性。 X射线衍射（XRD）测量表明，在这些温度下氧化的In _2O_3薄膜沿（2 2 2）平面显示出高度的晶体取向。场发射扫描电子显微镜显示在In_2O_3薄膜表面散布着大大小小的晶粒。光学和传感研究表明，在室温下暴露于1000 ppm的氨气中，在500°C氧化的In_2O_3薄膜具有3.8 eV的相对较高的光学带隙和92％的较大气体响应。还已经观察到在室温下对于不同浓度的氨的吸光度增加。

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