Crystallinity-Controlled Synthesis of Zirconium Oxide Thin Films on Nitrogen-Doped Carbon Nanotubes by Atomic Layer Deposition

Jian Liu; Xiangbo Meng; Mohammad Norouzi Banis

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Crystallinity-Controlled Synthesis of Zirconium Oxide Thin Films on Nitrogen-Doped Carbon Nanotubes by Atomic Layer Deposition

机译：原子层沉积在氮掺杂碳纳米管上结晶度控制的氧化锆薄膜的合成

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Zirconium oxide (ZrO2) thin film was deposited on nitrogen-doped carbon nanotubes (NCNTs) by atomic layer deposition (ALD) using tetrakis-(dimethylamido) zirconium (rv) and water as precursors. The observation using scanning electron microscope and transmission electron microscope (TEM) revealed that the tubular films of 100-cycle ZrO2 were very uniform and conformal on NCNTs. Further characterization using X-ray diffraction, Raman spectroscopy, selected area electron diffraction, and high-resolution TEM disclosed that the crystallinity of the deposited ZrO2 films was controllable with deposition temperatures in the range of 100-250 °C. In contrast to the pure amorphous ZrO2 film deposited at 100 °C, tetragonal crystalline ZrO2 film was prepared at 250 °C, while a mixture of the former two phases was found between 150 and 200 °C. In all cases, the growth of ZrO2 tubular films on NCNTs showed a transformation from an island-growth mode to a iayer-by-layer growth mode with increasing ALD cycles. The ZrO2-NCNT nanocomposites with controllable crystallinity will have great potential for various applications in fuel cells, batteries, electronics devices, and chemical sensors.

机译：以四-（二甲基氨基）锆（rv）和水为前驱体，通过原子层沉积（ALD）将氧化锆（ZrO2）薄膜沉积在氮掺杂的碳纳米管（NCNT）上。使用扫描电子显微镜和透射电子显微镜（TEM）进行的观察表明，100循环ZrO2的管状薄膜非常均匀且在NCNT上是共形的。使用X射线衍射，拉曼光谱，选定区域电子衍射和高分辨率TEM进行的进一步表征表明，沉积的ZrO2薄膜的结晶度可在100-250°C的范围内控制。与在100°C下沉积的纯非晶ZrO2膜相反，在250°C下制备了四方晶态ZrO2膜，而发现前两相的混合物在150至200°C之间。在所有情况下，随着ALD循环的增加，NrCNTs上ZrO2管状薄膜的生长显示出从岛生长模式到逐层生长模式的转变。具有可控制结晶度的ZrO2-NCNT纳米复合材料将在燃料电池，电池，电子设备和化学传感器的各种应用中具有巨大的潜力。

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《The journal of physical chemistry, C. Nanomaterials and interfaces》 |2012年第27期|共9页
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Jian Liu; Xiangbo Meng; Mohammad Norouzi Banis;
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1. Crystallinity-Controlled Synthesis of Zirconium Oxide Thin Films on Nitrogen-Doped Carbon Nanotubes by Atomic Layer Deposition [J] . Jian Liu, Xiangbo Meng, Mohammad Norouzi Banis The journal of physical chemistry, C. Nanomaterials and interfaces . 2012,第27期

机译：原子层沉积在氮掺杂碳纳米管上结晶度控制的氧化锆薄膜的合成
2. Air-stable conversion of separated carbon nanotube thin-film transistors from p-type to n-type using atomic layer deposition of high-κ oxide and its application in CMOS logic circuits [J] . Zhang J., Wang C., Fu Y., ACS nano . 2011,第4期

机译：高k氧化物原子层沉积将分离的碳纳米管薄膜晶体管从p型到n型的空气稳定转变及其在CMOS逻辑电路中的应用
3. Atomic layer deposition of zirconium oxide thin films [J] . Xin Wang, Sujan Kumar Ghosh, Mahyar Afshar-Mohajer, Journal of Materials Research . 2020,第7期

机译：氧化锆薄膜的原子层沉积
4. THE FERROELECTRICITY AND CRYSTALLINITY OF ZIRCONIA, HAFNIAAND HAFNIUM ZIRCONIUM OXIDE (HZO) ULTRATHIN FILMS PREPARED BY ATOMIC LAYER DEPOSITION WITH AND WITHOUT POST-ANNEALING [C] . Tzu-Yao Hsu, Bo-Ting Lin, Jay Shieh, ASME conference on smart materials, adaptive structures and intelligent systems . 2018

机译：原子层沉积（有和没有后退火）制备的氧化锆，氧化HA和氧化HA氧化锆（HZO）超薄膜的铁电性和结晶性
5. Structure and low-temperature tribology of lubricious nanocrystalline zinc oxide/aluminium oxide nanolaminates and zirconium dioxide monofilms grown by atomic layer deposition. [D] . Romanes, Maia Castillo. 2008

机译：通过原子层沉积法生长的润滑性纳米晶状氧化锌/氧化铝纳米层压板和二氧化锆单膜的结构和低温摩擦学。
6. Zirconium Oxide Thin Films Obtained by Atomic Layer Deposition Technology Abolish the Anti-Osteogenic Effect Resulting from miR-21 Inhibition in the Pre-Osteoblastic MC3T3 Cell Line [O] . Aleksandra Seweryn, Ariadna Pielok, Krystyna Lawniczak-Jablonska, 2020

机译：通过原子层沉积技术获得的氧化锆薄膜消除了成骨前MC3T3细胞系中miR-21抑制产生的抗成骨作用。
7. >Zirconium Oxide Thin Films Obtained by Atomic Layer Deposition Technology Abolish the Anti-Osteogenic Effect Resulting from miR-21 Inhibition in the Pre-Osteoblastic MC3T3 Cell Line [O] . Aleksandra Seweryn, Ariadna Pielok, Krystyna Lawniczak-Jablonska, 2020

机译：>通过原子层沉积技术获得的氧化锆薄膜通过预溶血性MC3T3细胞系列MIR-21抑制产生的抗骨质发生效果
8. Synthesis of Nanoporous Activated Iridium Oxide Films by Anodized Aluminum Oxide Templated Atomic Layer Deposition [R] . Comstock, D. J., Christensen, S. T., Elam, J. W., 2010

机译：阳极氧化铝模板原子层沉积法制备纳米多孔活性氧化铱薄膜

Crystallinity-Controlled Synthesis of Zirconium Oxide Thin Films on Nitrogen-Doped Carbon Nanotubes by Atomic Layer Deposition

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