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首页> 外文期刊>Surface & Coatings Technology >Influence of Zr and O on the structure and properties of TiC(N) coatings deposited by magnetron sputtering of composite TiC _(0.5)+ZrO _2 and (Ti, Zr)C _(0.5)+ZrO _2 targets
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Influence of Zr and O on the structure and properties of TiC(N) coatings deposited by magnetron sputtering of composite TiC _(0.5)+ZrO _2 and (Ti, Zr)C _(0.5)+ZrO _2 targets

机译:Zr和O对磁控溅射TiC _(0.5)+ ZrO _2和(Ti,Zr)C _(0.5)+ ZrO _2复合靶的磁控溅射沉积TiC(N)涂层结构和性能的影响

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摘要

The effect of Zr and O incorporation on the structure and properties of TiC(N) coatings deposited by DC magnetron sputtering of composite TiC _(0.5)+xZrO _2 (x=10 and 20wt.%) and (Ti,Zr)C _(0.5)+10%ZrO _2 targets in an argon atmosphere or reactively in a gaseous mixture of Ar+N _2 is presented. The structure, elemental and phase composition of the coatings were studied by means of X-ray diffraction, scanning electron microscopy, and glow discharge optical emission spectroscopy. The coatings were characterized in terms of their hardness, elastic modulus, and elastic recovery using the load-depth-sensing nanoindentation method. Tribological properties were investigated using ball-on-disk tests against cemented carbide at 25°C and alumina in the temperature range of 25-500°C. To evaluate the oxidation resistance, the coatings were annealed in air at 400, 550, and 600°C for 1h. The obtained results show that the TiZrCO(N) coatings exhibit a peak hardness versus nitrogen partial pressure. The coatings with maximum hardness tested at room temperature against WC+Co and Al _2O _3 counterparts showed low friction coefficients below 0.25. At higher temperatures 300-500°C, the friction coefficient against an Al _2O _3 ball was recorded to be 0.6. The tribological tests of the coatings demonstrated their high wear resistance at moderate temperatures 25-300°C (wear rate, k~10 ~(-6)mm ~3N ~(-1)m ~(-1)). Moreover, the coatings with high Zr content were the most wear resistant. The oxidation resistance of the Zr-doped TiCON coatings was not as high as expected and restricted by 600°C. The combination of high hardness about 40GPa with low friction coefficient and superior wear resistance makes the TiZrCON coatings promising candidates for various dry tribological applications.
机译:Zr和O的掺入对复合磁控TiC _(0.5)+ xZrO _2(x = 10和20wt。%)和(Ti,Zr)C _的直流磁控溅射沉积TiC(N)涂层的结构和性能的影响提出了在氩气氛中或在Ar + N _2的气体混合物中具有反应性的(0.5)+ 10%ZrO _2靶。通过X射线衍射,扫描电子显微镜和辉光放电光发射光谱法研究了涂层的结构,元素和相组成。使用负载深度传感纳米压痕法,以涂层的硬度,弹性模量和弹性回复为特征。在25°C和25-500°C的温度范围内使用硬质合金对硬质合金和氧化铝的摩擦性能进行了摩擦学研究。为了评估抗氧化性,将涂层在空气中于400、550和600°C退火1小时。所获得的结果表明,TiZrCO(N)涂层的峰值硬度与氮分压有关。在室温下针对WC + Co和Al _2O _3对应物测试的最大硬度涂层表现出低于0.25的低摩擦系数。在300-500℃的较高温度下,相对于Al _2O _3球的摩擦系数记录为0.6。涂层的摩擦学测试表明,它们在25-300°C的中等温度下具有很高的耐磨性(磨损率k〜10〜(-6)mm〜3N〜(-1)m〜(-1))。而且,具有高Zr含量的涂层是最耐磨的。掺Zr的TiCON涂层的抗氧化性不如预期的那样高,并且受600°C的限制。 TiZrCON涂层具有约40GPa的高硬度,低摩擦系数和优异的耐磨性,这些特性使TiZrCON涂层有望成为各种干摩擦应用的候选材料。

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