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首页> 外文期刊>Journal of Applied Polymer Science >Crosslinking and decomposition reactions of epoxide functionalized polynorbornene. Part I. FTIR and thermogravimetric analysis
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Crosslinking and decomposition reactions of epoxide functionalized polynorbornene. Part I. FTIR and thermogravimetric analysis

机译：环氧官能化聚降冰片烯的交联和分解反应。第一部分FTIR和热重分析

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摘要

The miniaturization of microelectronic devices has created a demand for new low-dielectric-constant materials to be used as insulating layers between metal interconnects. In this study, a functionalized polynorbornene consisting of a copolymer of decyl norbornene and epoxide norbornene has been investigated as a low-temperature curing dielectric. Polynorbornenes possess properties that are attractive for microelectronics packaging; however, films of these polymers must be crosslinked in order to obtain the solvent resistance and low solvent swelling necessary for multilayer applications. Crosslinking of these materials was achieved by acid-catalyzed cationic crosslinking of epoxide side groups. The reactions that occurred during higher temperature curing of epoxy functionalized norbornene films were studied using Fourier transform infrared (FTIR) spectroscopy and thermogravimetric analysis. Epoxide crosslinking and epoxide decomposition reactions were identified and studied as a function of temperature and time. (C) 2003 Wiley Periodicals, Inc. [References: 18]
机译：微电子器件的小型化产生了对新的低介电常数材料以用作金属互连之间的绝缘层的需求。在这项研究中，已研究了由癸基降冰片烯和环氧降冰片烯的共聚物组成的功能化聚降冰片烯作为低温固化电介质。聚降冰片烯具有对微电子包装有吸引力的特性;然而，这些聚合物的膜必须交联以获得多层应用所需的耐溶剂性和低溶胀性。这些材料的交联通过环氧化物侧基的酸催化阳离子交联实现。使用傅立叶变换红外（FTIR）光谱和热重分析法研究了环氧官能化降冰片烯薄膜高温固化过程中发生的反应。确定并研究了环氧交联和环氧分解反应随温度和时间的变化。 （C）2003 Wiley Periodicals，Inc. [参考：18]

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