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首页> 外文期刊>Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics >Structural, optical and hydrophilic properties of nanocrystalline TiO_2 ultra-thin films prepared by pulsed dc reactive magnetron sputtering
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Structural, optical and hydrophilic properties of nanocrystalline TiO_2 ultra-thin films prepared by pulsed dc reactive magnetron sputtering

机译：脉冲直流反应磁控溅射制备纳米TiO_2超薄膜的结构，光学和亲水性能

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摘要

TiO_2 ultra-thin (15 nm) films were deposited on silicon wafers (100) and glass slides by pulsed dc reactive magnetron sputtering in an ultra-high vacuum (UHV) system. The effects of substrate temperature, from room temperature to 400 °C, on structural, optical, and hydrophilic properties of the obtained films have been investigated. The structure of the films was characterized by grazing-incidence X-ray diffraction, high-resolution transmission electron microscopy, and atomic force microscopy. The optical properties were determined by UV-vis spectrophotometer and spectroscopic ellipsometry. The hydrophilic properties of the films, after exposed to ultraviolet illumination, were analyzed from contact angle measurements. The results suggested that the substrate temperature at 300 °C was critical in the crystalline phase transformation from amorphous to anatase in the TiO_2 films. The obtained films exhibited good qualities in the optical properties, in addition to excellent photo-induced hydrophilic activities.
机译：在超高真空（UHV）系统中，通过脉冲dc反应磁控溅射将TiO_2超薄（15 nm）膜沉积在硅晶片（100）和载玻片上。研究了基材温度（从室温到400°C）对所得薄膜的结构，光学和亲水性能的影响。膜的结构通过掠入射X射线衍射，高分辨率透射电子显微镜和原子力显微镜表征。光学性质通过紫外可见分光光度计和椭圆偏振光谱法测定。从接触角测量中分析了暴露于紫外线下的膜的亲水性。结果表明，衬底温度为300°C对于TiO_2薄膜从非晶态到锐钛矿的晶相转变至关重要。除了优异的光致亲水活性之外，所得膜还表现出良好的光学性质。

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