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首页> 外文期刊>Journal of Materials Science >Atomic force microscopy tip torsion contribution to the measurement of nanomechanical properties
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Atomic force microscopy tip torsion contribution to the measurement of nanomechanical properties

机译：原子力显微镜尖端扭转对纳米力学性能测量的贡献

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摘要

The nanomechanical properties of polymethyl methacrylate and indium phosphide were measured with an atomic force microscope and a nanoindentation system. The elastic moduli measured with the atomic force microscope are in good agreement with the values obtained with the nanoindentation system. The hardness is shown to be affected by the tip radius used in our experiments. The cantilever vertical and lateral movements were independently analyzed during nanoindentation, and the tip torsion can be attributed to a change from elastic to plastic deformation regimes of materials during force microscopy nanoindentation. An analysis of the lateral movement of the laser beam associated with the cantilever torsion was used to determine the material yield stress.
机译：用原子力显微镜和纳米压痕系统测量了聚甲基丙烯酸甲酯和磷化铟的纳米机械性能。用原子力显微镜测量的弹性模量与用纳米压痕系统获得的值非常吻合。硬度显示受我们实验中使用的尖端半径的影响。在纳米压痕过程中独立分析悬臂的垂直和横向运动，并且在力显微镜纳米压痕过程中，尖端扭转可归因于材料从弹性变形到塑性变形的变化。对与悬臂扭转相关的激光束横向运动的分析用于确定材料的屈服应力。

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