RECOIL IMPLANTATION OF ALPHA SOURCES FOR THICKNESS MEASUREMENT OF THIN FILMS

Kelson I.; Redmard E.; Levy Y.

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RECOIL IMPLANTATION OF ALPHA SOURCES FOR THICKNESS MEASUREMENT OF THIN FILMS

机译：阿尔法源的反冲植入以测量薄膜的厚度

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A sequence of radioactive decays can be used to implant alpha-emitting sources in substrates for thickness measurements of films grown on them. Starting with Th-228, both direct recoil implantation of Ra-224 and a two-stage recoil implantation of Pb-212 were performed. The thickness of germanium layers grown on gallium arsenide was determined by measuring the energy loss of the alpha particles traversing them. The results were found to be consistent with those obtained by other methods. The special advantages of the present procedure are discussed. [References: 8]

机译：一系列放射性衰变可用于将α发射源植入衬底中，以测量在其上生长的薄膜的厚度。从Th-228开始，进行了Ra-224的直接后坐植入和Pb-212的两阶段后坐植入。在砷化镓上生长的锗层的厚度是通过测量横穿它们的α颗粒的能量损失来确定的。发现结果与通过其他方法获得的结果一致。讨论了本程序的特殊优点。 [参考：8]

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《Journal of Physics, D. Applied Physics: A Europhysics Journal》 |1995年第1期|共5页
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Kelson I.; Redmard E.; Levy Y.;
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1. RECOIL IMPLANTATION OF ALPHA SOURCES FOR THICKNESS MEASUREMENT OF THIN FILMS [J] . Kelson I., Redmard E., Levy Y. Journal of Physics, D. Applied Physics: A Europhysics Journal . 1995,第1期

机译：阿尔法源的反冲植入以测量薄膜的厚度
2. Thin YAP:Ce and LaBr_3:Ce scintillators as proton detectors of a thin-film proton recoil neutron spectrometer for fusion and spallation sources applications [J] . C. Cazzaniga, M. Nocente, M. Tardocchi, Nuclear Instruments & Methods in Physics Research . 2014,第jula1期

机译：薄的YAP：Ce和LaBr_3：Ce闪烁体，作为质子反冲中子光谱仪的质子探测器，用于聚变和散裂源应用
3. Investigation of the recoil implantation for thin layer activation and wear measurements [J] . F. Ditroi, I. Mahunka Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear . 1998,第1期

机译：反冲植入的研究，用于薄层激活和磨损测量
4. Combined thin-film thickness measurement and surface metrology of photovoltaic thin films using Coherence Correlation Interferometry [C] . Maniscalco, Biancamaria IEEE Photovoltaic Specialists Conference;PVSC . 2012

机译：相干相关干涉法结合光伏薄膜的薄膜厚度测量和表面计量
5. NUCLEAR REACTION MEASUREMENT OF IMPLANTED OXYGEN-18 TRANSPORT DURING WATER DIFFUSION IN THIN SILICON-DIOXIDE FILMS. [D] . PFEFFER, ROBERT LESTER. 1980

机译：薄二氧化硅薄膜中水扩散过程中注入的Oygen-18传输的核反应测量。
6. Treasure of the Past VII: Measurement of the Thickness and Refractive Index of Very Thin Films and the Optical Properties of Surfaces by Ellipsometry [O] . Frank L. McCrackin, Elio Passaglia, Robert R. Stromberg, 2001

机译：过去的宝藏VII：通过椭偏仪测量非常薄膜的厚度和折射率以及表面的光学性质
7. Energy Dependent XPS Measurements on Thin Films of a Poly(vinyl methyl ether)/Polystyrene Blend in Dependence on Film Thickness – Concentration Profile on a Nanometer Resolution to Understand the Behavior of Nanofilms [O] . Marcel Gawek, Sherif Madkour, Paulina Szymoniak, 2021

机译：在聚（乙烯基甲基醚）/聚苯乙烯混合物的薄膜上的能量依赖性XPS测量依赖于薄膜厚度曲线上纳米分辨率，以了解纳米叶片的行为
8. THICKNESS MEASUREMENT OF THIN POLYMER FILMS USING A SEMICONDUCTOR ALPHA DETECTOR [R] . Kazuo TERANISHI 1966

机译：使用半导体aLpHa检测器测量薄聚合物薄膜的厚度

RECOIL IMPLANTATION OF ALPHA SOURCES FOR THICKNESS MEASUREMENT OF THIN FILMS

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