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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Evaluation of length-scale effects for mechanical behaviour of micro-and nanocantilevers: I. Experimental determination of length-scale factors
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Evaluation of length-scale effects for mechanical behaviour of micro-and nanocantilevers: I. Experimental determination of length-scale factors

机译：微米和纳米悬臂梁力学行为的长度尺度效应评价：I.长度尺度因子的实验确定

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摘要

When the thickness of micro-and nanocantilevers, which are the building blocks of micro-and nanoelectromechanical systems, are below 10 νm, the natural frequency and quasi-static deflection of the cantilevers cannot be estimated accurately using the conventional natural frequency and quasi-static-deflection models. The effect of the thickness is summed into what is known as the length-scale factor, which is incorporated into the models in order to improve the accuracy of the models. With this in mind, this paper, which is the first of two parts, reports on the experimental determination of length-scale factors for micro-and nano-sized silicon cantilevers, the micro-and nano-sized length-scale factors are estimated using experimental data collected from nanoindentation and microindentation experiments. The same experimental data are used to cross-validate the empirical length-scale factors in the literature. The experimentally estimated length-scale factors are then incorporated into the natural frequency and static-deflection models. The experimental results presented suggest that the length-scale factors have a great influence on the natural frequency and quasi-static deflection of micro-and nano-sized silicon cantilevers, compared with the natural frequency and deflection calculated using the conventional models not incorporating the length-scale factor.
机译：当构成微米和纳米机电系统的微悬臂和纳米悬臂的厚度小于10νm时，无法使用常规固有频率和准静态准确估算悬臂的固有频率和准静态挠度变形模型。厚度的影响被汇总到所谓的长度比例因子中，该比例因子被合并到模型中以提高模型的准确性。考虑到这一点，本文是两部分的第一部分，报告了实验确定微米级和纳米级硅悬臂梁的长度比例因子的方法，使用以下方法估算了微米级和纳米级的长度比例因子从纳米压痕和微压痕实验收集的实验数据。相同的实验数据用于交叉验证文献中的经验长度比例因子。然后将实验估算的长度比例因子合并到固有频率和静态挠度模型中。实验结果表明，与使用常规模型未考虑长度的自然频率和挠度相比，长度比例因子对微米级和纳米级硅悬臂梁的固有频率和准静态挠度有很大影响。 -比例因子。

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