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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Spatially resolved simulation of a radio-frequency driven micro-atmospheric pressure plasma jet and its effluent
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Spatially resolved simulation of a radio-frequency driven micro-atmospheric pressure plasma jet and its effluent

机译：射频驱动的大气压等离子体射流及其流出物的空间分辨模拟

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摘要

Radio-frequency driven plasma jets are frequently employed as efficient plasma sources for surface modification and other processes at atmospheric pressure. The radio-frequency driven micro-atmospheric pressure plasma jet (μAPPJ) is a particular variant of that concept whose geometry allows direct optical access. In this work, the characteristics of the μAPPJ operated with a helium-oxygen mixture and its interaction with a helium environment are studied by numerical simulation. The density and temperature of the electrons, as well as the concentration of all reactive species are studied both in the jet itself and in its effluent. It is found that the effluent is essentially free of charge carriers but contains a substantial amount of activated oxygen (O, O_3 and O_2(~1Δ)). The simulation results are verified by comparison with experimental data
机译：射频驱动的等离子体射流经常被用作有效的等离子体源，用于大气压下的表面改性和其他工艺。射频驱动的微大气压等离子体射流（μAPPJ）是该概念的特定变体，其几何形状允许直接光学访问。在这项工作中，通过数值模拟研究了用氦氧混合物操作的μAPPJ的特性及其与氦气环境的相互作用。电子的密度和温度以及所有反应性物质的浓度都在射流本身及其流出物中进行了研究。发现流出物基本上不含电荷载流子，但包含大量的活化氧（O，O_3和O_2（〜1Δ））。通过与实验数据的比较验证了仿真结果

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