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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Dynamics of neutral gas depletion investigated by time- and space-resolved measurements of xenon atom ground state density
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Dynamics of neutral gas depletion investigated by time- and space-resolved measurements of xenon atom ground state density

机译：通过氙原子基态密度的时间和空间分辨测量研究中性气体耗竭的动力学

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摘要

The dynamics of neutral gas depletion in high-density plasmas is investigated by time- and space-resolved measurements of the xenon ground state density. Two-photon absorbed laser induced fluorescence experiments were carried out in a helicon reactor operating at 10mTorr in xenon gas. When the plasma is magnetized, a plasma column is formed from the bottom of the chamber up to the pumping region. In this situation it is found that two phenomena, with different time scales, are responsible for the neutral gas depletion. The magnetized plasma column is ignited in a short (millisecond) time scale leading to a neutral gas depletion at the discharge centre and to an increase of neutral gas density at the reactor walls. This is explained both by neutral gas heating and by the rise of the plasma pressure at the discharge centre. Then, on a much longer (second) time scale, the overall neutral gas density in the reactor decreases due to higher pumping efficiency when the magnetized plasma column is ignited. The pumping enhancement is not observed when the plasma is not magnetized, probably because in this case the dense plasma column vanishes and the plasma is more localized near the antenna.
机译：通过对氙基态密度的时间和空间分辨测量，研究了高密度等离子体中的中性气体消耗动力学。在氙气中，在10mTorr下运行的螺旋反应器中，进行了两光子吸收激光诱导的荧光实验。当等离子体被磁化时，从腔室的底部直到泵浦区域形成一个等离子体柱。在这种情况下，发现时间尺度不同的两种现象是中性气体消耗的原因。磁化的等离子体柱在短（毫秒）时间内被点燃，导致排放中心的中性气体消耗减少，并导致反应器壁的中性气体密度增加。这既可以通过中性气体加热，也可以通过放电中心的等离子压力升高来解释。然后，在更长的（第二）时间尺度上，由于在点燃磁化等离子体柱时更高的泵送效率，反应器中的总中性气体密度会降低。当等离子体未磁化时，未观察到泵浦增强，这可能是因为在这种情况下，密集的等离子体柱消失了，等离子体更局限在天线附近。

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